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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
J'Afer; Hussein
Address:
Whitwick, GB
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
6090247 Apparatus for coating substrates July 18, 2000
The current invention relates to the provision of apparatus for depositing layers of material onto substrates (2) mounted on a carrier (4) all provided in a vacuum chamber (6) wherein the material is deposited by sputtering of targets of the material from activated magnetrons (7, 7')


 
 
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