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Inventor: J'Afer; Hussain
Address: Whitwick, GB
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6159351 |
Magnet array for magnetrons |
December 12, 2000 |
| The invention relates to improvements and the formation of magnetrons for use in sputter depositing material from a targeted material mounted therein. The improvement allows contamination of the target to be reduced in comparison to those of conventional magnetrons, arcing of the magnetr |
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