Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Ishibashi; Keiji
Address:
Tokyo, JP
No. of patents:
4
Patents:












Patent Number Title Of Patent Date Issued
6955836 Silicon oxide film formation method October 18, 2005
A silicon oxide film formation method enhances the efficiency of generating atomic oxygen and improves film quality of a silicon film (SiO.sub.2 film) in forming the silicon oxide film using an RS-CVD system. Nitrogen atom containing gas (N.sub.2 gas, NO gas, N.sub.2 O gas, NO.sub.2 gas
6942892 Hot element CVD apparatus and a method for removing a deposited film September 13, 2005
The present invention provides a method for efficiently and completely removing a film deposited inside a film forming chamber. In addition, the invention provides a CVD apparatus using heating element which an in-situ cleaning method can be applied and its in-situ leaning method.The rem
6593548 Heating element CVD system July 15, 2003
A heating element CVD device capable of providing a high productivity and decomposing and/or activating the material gas led into a processing container by a heating element and stacking film on a substrate disposed in the processing container, wherein the connection part area of the
6375756 Method for removing a deposited film April 23, 2002
A method for efficiently and completely removing a film deposited inside a film forming chamber and an in-situ cleaning method of a hot element CVD apparatus. A hot element is disposed in a chamber is heated up to a temperature of 2000.degree. C. or higher after the chamber is exhausted.










 
 
  Recently Added Patents
Plants and seeds of hybrid corn variety CH260114
Coding circuitry for difference-based data transformation
Multiplexing channels by a medium access controller
Soybean EF1A promoter and its use in constitutive expression of transgenic genes in plants
Preparation and its use of derivatization reagent for detecting L-carnitine or D-carnitine
Compositions and processes for forming photovoltaic devices
Methods and compositions for improving photodynamic therapy through administration of lipids
  Randomly Featured Patents
Convertible hat
System switch
Systems and methods for aircraft flight tracking and display
Process for electrolytically purifying a photographic waste solution
Acyl CoA:cholesterol acyltransferase inhibitors
Novel phosphorescent condoms
High speed multi-threaded reduced instruction set computer (RISC) processor with hardware-implemented thread scheduler
Transflective liquid crystal display and manufacturing method thereof
Image sensor and method for manufacturing the same
High temperature generalized corrosion test installation