| Patent Number |
Title Of Patent |
Date Issued |
| 7595087 |
Process of forming platinum coating catalyst layer in moisture-generating reactor |
September 29, 2009 |
| A barrier film which has uniform thickness and excellent adhesiveness to the base material and superbly functions to protect a platinum film can be formed on the inner wall surface of a moisture-generating reactor at ease and at a low cost. The moisture-generating reactor in which hydrog |
| 7594517 |
Gas supply facility of a chamber and a method for an internal pressure control of the chamber fo |
September 29, 2009 |
| The present invention prevents substantial reduction of flow rate control accuracy in a small flow quantity range, achieves accurate flow rate control over the entire range of flow rate control, and also allows control of a wide pressure range of a chamber with accurate flow rate con |
| 7553459 |
Apparatus and reactor for generating and feeding high purity moisture |
June 30, 2009 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7497482 |
Pipe joint |
March 3, 2009 |
| A pipe joint comprises a first joint member of synthetic resin having an annular recessed portion in an end face thereof, and a second joint member of synthetic resin having an annular ridge on an end face thereof. The ridge is fitted in the opening of the recessed portion, with a sy |
| 7472887 |
Valve for vacuum exhaustion system |
January 6, 2009 |
| The present invention provides a valve which makes it possible to reduce the diameter of the vacuum exhaustion pipings for making the facility for the vacuum exhaustion system small, as a result lowering the costs, and making the vacuum exhaustion time short, and also which can prevent t |
| 7416165 |
Diaphragm valve for the vacuum exhaustion system |
August 26, 2008 |
| A diaphragm valve 1 is provided with a body 2 having a flow-in passage 6, a flow-out passage 7, and a valve seat 8 formed between the passages; a diaphragm 3 installed in the body 2 and permitted to rest on and move away from the valve seat 8; and a driving means 4 installed on the body |
| 7368092 |
Apparatus and reactor for generating and feeding high purity moisture |
May 6, 2008 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7367241 |
Differential pressure type flowmeter and differential pressure type flow controller |
May 6, 2008 |
| A differential pressure type flowmeter comprises an orifice, a detector to detect a fluid pressure P.sub.1 on the upstream side of an orifice, a detector to detect a fluid pressure P.sub.2 on the downstream side of an orifice, a detector to detect a fluid temperature T on the upstream si |
| 7363810 |
Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device usin |
April 29, 2008 |
| A corrosion resistant thermal type mass flow rate sensor, and a fluid supply device employing the sensor are provided thus allowing enhanced corrosion resistance of the thermal type mass flow rate sensor, improve responsiveness, to be achieved particle-free, and to prevent unevenness |
| 7278437 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing |
October 9, 2007 |
| A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2 |
| 7258845 |
Apparatus and reactor for generating and feeding high purity moisture |
August 21, 2007 |
| A safe, reduced pressure apparatus for generating water vapor from hydrogen and oxygen and feeding high purity moisture to processes such as semiconductor production. The apparatus eliminates the possibility of the gas igniting by maintaining the internal pressure of the catalytic re |
| 7219533 |
Small hole diameter automatic measuring apparatus, small hole diameter measurement method, and s |
May 22, 2007 |
| A small hole diameter measuring apparatus including: a flow rate measurement section comprised of an automatic pressure control device which supplies a fluid to the inlet side of small holes in a plate while maintaining the outlet- and inlet-side pressures of the small holes in the c |
| 7150444 |
Valve with an integral orifice |
December 19, 2006 |
| A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by |
| 7103990 |
Rotary silicon wafer cleaning apparatus |
September 12, 2006 |
| It is an object of the present invention to provide a rotation type silicon wafer cleaning device to further raise the stability of a silicon wafer by providing a better hydrogen termination on the silicon wafer after completion of chemical and pure water cleaning treatments.According |
| 7085628 |
Apparatus for the correction of temperature drift for pressure sensor, pressure control apparatu |
August 1, 2006 |
| A pressure sensor, a pressure control apparatus, and a flow rate control apparatus are provided to automatically correct temperature drift of the pressure sensor and accurately detect pressure despite changes in temperature. An embodiment includes an upstream side pressure sensor bet |
| 7080658 |
Method for closing fluid passage, and water hammerless valve device and water hammerless closing |
July 25, 2006 |
| A fluid passage is emergently-closed in a short time without causing a water hammer by an extremely simple device and operation. A water hammerless closing device includes an actuator operated valve provided in a fluid passage, an electro-pneumatic conversion device for supplying a 2 |
| 7008598 |
Reactor for generating moisture |
March 7, 2006 |
| A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, the peeling off of the platinum coat catalyst layer inside are prevented more completely to further increase the safety of the reactor for generating moisture and wherein the d |
| 6964279 |
Pressure-type flow rate control apparatus |
November 15, 2005 |
| A pressure-type flow rate control apparatus controls the flow rate of fluid passing through an orifice to a target flow rate. The flow rate of a compressible fluid under non-critical conditions (sub-sonic) passing through the orifice is calculated by:Also provided is an improved pressure |
| 6919056 |
Reactor for generating moisture |
July 19, 2005 |
| A reactor for generating moisture wherein ignition of hydrogen gas, backfire to the gas supply source side, and the peeling off of the platinum coat catalyst layer inside are all prevented more completely to further increase the safety of the reactor for generating moisture, and wher |
| 6871803 |
Valve with an integral orifice |
March 29, 2005 |
| A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by |
| 6848470 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow contr |
February 1, 2005 |
| A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow |
| 6820632 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow contr |
November 23, 2004 |
| A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow |
| 6733732 |
Reactor for generating moisture |
May 11, 2004 |
| A reactor comprising a body made of a heat-resistant material and having an inlet and an outlet for water/moisture gas, having a gas-diffusing member provided in an internal space of the body, and having a platinum coating on an internal wall surface of the body. Hydrogen and oxygen fed |
| 6672942 |
Grinding machine for welding electrodes |
January 6, 2004 |
| A grinding machine for welding electrodes comprises a housing 1, grinder motor 2, grinding disk 3, swing plate 4, holder guide 6, electrode holder 7, electrode turning motor 8 and swing plate moving mechanism 9. The axis .phi.a of electrode A extends along a line perpendicular to the axi |
| 6622543 |
Gas detection sensor |
September 23, 2003 |
| A gas detection sensor permits precise measurement of the concentration of flammable gas in a detection or subject gas and the concentration of oxygen in a detection gas containing flammable gases. In the sensor, the heating of the sensor by contact catalytic reaction of flammable gas gi |
| 6615871 |
Fluid control apparatus |
September 9, 2003 |
| An on-off device disposed at each of the inlet and the outlet of a fluid controller is one of five kinds of on-off devices, i.e., on-off device having a two-port valve, on-off device having a two-port valve and a three-port valve, on-off device having a two-port valve and two three-port |
| 6606912 |
Structure or construction for mounting a pressure detector |
August 19, 2003 |
| A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature |
| 6450190 |
Method of detecting abnormalities in flow rate in pressure-type flow controller |
September 17, 2002 |
| A method of detecting abnormalities in flow rate in pressure-type flow controller. The method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice--the pressure-type flow controller wherein with the up |
| 6422264 |
Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow contr |
July 23, 2002 |
| A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow |
| 6408879 |
Fluid control device |
June 25, 2002 |
| A fluid control device comprises a first passageway, and a second passageway communicating therewith and having a terminating end closed with a fluid control unit or instrument. The first passageway is adapted to pass a fluid therethrough with a different fluid remaining in the secon |
| 6387158 |
Method of removing moisture in gas supply system |
May 14, 2002 |
| A method of removing moisture efficiently in the gas supply system by evacuation at normal temperature without using the baking method. The method involves flowing a gas to remove moisture in the gas supply system with the flow pressure of the gas to remove moisture set at not lower than |
| 6360762 |
Method for feeding gases for use in semiconductor manufacturing |
March 26, 2002 |
| An apparatus for feeding gases for use in semiconductor manufacturing reduced in size and manufacturing costs and facilitating maintenance and operation of the gas supply system. The apparatus comprises a plurality of gas supply sources, gas source valves provided on the gas lead-out pip |
| 6334962 |
Low flow rate moisture supply process |
January 1, 2002 |
| A process of supplying moisture at low flow rates which permits high precision control of the flow of moisture to a semiconductor manufacturing line from an apparatus for the generation of moisture, characterized in that the flow of hydrogen to a moisture-generating reactor is controlled |
| 6302130 |
Method and apparatus for detection of orifice clogging in pressure-type flow rate controllers |
October 16, 2001 |
| A method and apparatus for detection of clogging of an orifice by measuring the upstream side pressure without breaking up the piping system in a flow rate control unit using an orifice, so as to extend the life of the flow rate control unit and enhance its safety. The apparatus of detec |
| 6289923 |
Gas supply system equipped with pressure-type flow rate control unit |
September 18, 2001 |
| An improved and reduced-size and low-cost gas supply system equipped with a pressure-type flow rate control unit, to be used, for instance, in semiconductor manufacturing facilities is disclosed. Transient flow rate characteristics are improved to prevent the gas from overshooting when t |
| 6274098 |
Apparatus for the treatment of exhaust gases by combining hydrogen and oxygen |
August 14, 2001 |
| An apparatus for the treatment of exhaust gases containing hydrogen which permits always stable treatment with certainty of the exhaust gases from a semiconductor manufacturing line or the like irrespective of violent fluctuations in the flow rate of the exhaust gases, without having adv |
| 6273477 |
Gasket and pipe joint |
August 14, 2001 |
| A pipe joint comprises a pair of tubular joint members, an annular gasket interposed between opposed end faces of the two joint members, and threaded means for joining the two joint members. Each of the joint members is prepared from a stainless steel having a surface with a Vickers |
| 6273139 |
Fluid control apparatus |
August 14, 2001 |
| A fluid control apparatus having a plurality of fluid control members each further having, a blocklike body with an upper side and a lower side, at least one monofunctional member for controlling fluid mounted on the upper side of the blocklike body, and at least one fluid channel formed |
| 6257270 |
Fluid control device |
July 10, 2001 |
| A fluid control device has formed in a valve main body a main channel communicating with an inlet of a channel within a massflow controller, and a relatively long subchannel and a relatively short subchannel both communicating with the main channel. The process gas to be assure of high |
| 6210482 |
Apparatus for feeding gases for use in semiconductor manufacturing |
April 3, 2001 |
| An apparatus for feeding gases for use in semiconductor manufacturing reduced in size and manufacturing costs and facilitating maintenance and operation of the gas supply system. The apparatus comprises a plurality of gas supply sources, gas source valves provided on the gas lead-out pip |
| 6180067 |
Reactor for the generation of water |
January 30, 2001 |
| An improved reactor for generating water from hydrogen and oxygen which allows production of moisture at a high conversion rate exceeding 99 percent with the temperature kept under some 400.degree. C. inside the reactor shell (1) and with the water vapor production being more than 1, |
| 6178995 |
Fluid supply apparatus |
January 30, 2001 |
| A fluid feeding apparatus includes parallel flow passages connected at their downstream side, each parallel passage including a pressure flow controller (C) for regulating the flow of fluid and a fluid changeover valve (D) for opening and closing the passage on the downstream side of |
| 6170890 |
Pipe joint |
January 9, 2001 |
| Each of seal projections 7, 8 is positioned radially outward of an inner periphery 1a, 2a of abutting end face of each of joint members 7, 8 and has in section a contour which comprises a circular-arc portion 7b, 8b extending radially outward from the abutting end face, and a straight |
| 6158679 |
Orifice for pressure type flow rate control unit and process for manufacturing orifice |
December 12, 2000 |
| An orifice for a pressure-type flow rate controller, which can be produced by a simple method at a low cost, that provides a linearity--between the pressure P1 on the upstream side of the orifice and the flow rate--over a wide range of the pressure ratio P2/P1 of the pressure P2 on the |
| 6152168 |
Pressure-type flow rate control apparatus |
November 28, 2000 |
| A pressure-type flow rate control apparatus for use especially in the gas supply system in semiconductor manufacturing facilities. The flow control apparatus is provided with a bore-variable orifice, which permits easy switching of the fluid flow rate control range as well as size reduct |
| 6145888 |
Pipe joint with inspection window |
November 14, 2000 |
| A pipe joint comprises a pair of tubular joint members made of a metal and each having an abutting end face, an annular gasket made of a metal and interposed between the abutting end faces of the respective joint members, a nut joining the joint members together and a retainer holding th |
| 6135155 |
Fluid control device |
October 24, 2000 |
| A regulator for regulating a flow rate is provided with an upper connector having a downwardly opened channel in communication with the regulator. An on-off valve connected to the regulator is provided with a lower connector having an upwardly opened channel in communication with the on- |
| 6116092 |
Fluid pressure detector using a diaphragm |
September 12, 2000 |
| A good quality passive-state film is formed on a gas-contact face of a diaphragm of a pressure detector using a sensor chip to prevent corrosion on, or water content emission from, or catalytic action at a gas-contact face, thereby improving production quality in a semiconductor manu |
| 6093662 |
Method for generating water for semiconductor production |
July 25, 2000 |
| Process for generating moisture for use in semiconductor manufacturing, the process comprising feeding hydrogen and oxygen into a reactor provided with a platinum-coated catalyst layer on an interior wall, thus enhancing the reactivity between hydrogen and oxygen by catalytic action and |
| 6060691 |
Device for heating fluid controller |
May 9, 2000 |
| A device for heating a fluid controller comprises a pair of platelike side heaters pressed respectively against a pair of opposite side faces of a body of the fluid controller with an insulating layer provided between each heater and each side face, a pair of side holding members each ha |
