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Inventor: Ichimura; Takashi
Address: Hitachinaka, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7550724 |
Electron beam device and its control method |
June 23, 2009 |
| An electron beam device includes an electron gun section having an internal space kept at an ultrahigh vacuum level for generating a primary electron beam, a mirror section having an internal space kept at a vacuum level lower than that of the electron gun section for scanning a specimen |
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