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Ichimura; Takashi
Hitachinaka, JP
No. of patents:

Patent Number Title Of Patent Date Issued
7550724 Electron beam device and its control method June 23, 2009
An electron beam device includes an electron gun section having an internal space kept at an ultrahigh vacuum level for generating a primary electron beam, a mirror section having an internal space kept at a vacuum level lower than that of the electron gun section for scanning a specimen

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