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Inventor: I; Simon Choo
Address: Singapore, SG
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6255266 |
Alkyldione peroxides as cleaning solutions for wafer fabs |
July 3, 2001 |
| A method of cleaning elemental copper, cobalt, or nickel from the surface of equipment hardware without corroding or damaging the equipment parts and surfaces in the event of wafer breakage and non-wafer breakage is described. A solution comprising an alkyldione peroxide, a stabilizing |
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