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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
I; Lin
Address:
Piermont, NY
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
4581118 Shaped field magnetron electrode April 8, 1986
A substrate support electrode for use in plasma processing equipment has a book-shaped prismatic body containing a magnet core with flange-like pole pieces at each end to provide a longitudinal magnetic field wrapped around the electrode body. An auxiliary field-shaping magnet spaced fro


 
 
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