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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Hwang; Cherngye
Address:
San Jose, CA
No. of patents:
59
Patents:


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Patent Number Title Of Patent Date Issued
8220136 Forming a planarized surface for at least one bar of sliders July 17, 2012
A method for forming a planarized surface for at least one bar of sliders for utilization in a hard disk drive is disclosed. In general, at least one bar of sliders is placed on an adhesive layer. A single thermoplastic layer is then provided above the at least one bar of sliders. The si
8191234 Method of manufacturing a magnetic head with reinforcing islands June 5, 2012
A method for protecting a thin film structure including fabricating a plurality of island structures in a recording gap of a magnetic recording head, exposing a substantial portion of the plurality of island structures by removing at least a portion of the surrounding recording gap m
8096539 O-ring free cooling pallet for hard disk drive slider carriers January 17, 2012
An o-ring free cooling pallet for holding a carrier is disclosed. The pallet comprises a first clamp fixed to a planar surface of the pallet for coupling with a first edge of the carrier. The pallet also comprises a second clamp removably coupled to the planar surface of the pallet for
7929251 Assembly, apparatus and method for fabricating a structural element of a hard disk drive air bea April 19, 2011
An assembly, apparatus and method for fabricating a structural element of a hard disk drive air bearing. The method and apparatus provide an improved protective layer, an improved structural element consisting of a single layer of structural material, and a method consisting of applying
7911741 Slider overcoat for noise reduction of TMR magnetic transducer March 22, 2011
A hard disk drive slider comprises an overcoat layer, which covers an air-bearing surface of the slider. The overcoat covers an exposed surface of a tunneling magnetoresistance transducer. An adhesion layer is coupled with the overcoat layer and the air-bearing surface. The adhesion laye
7883607 Methods of ion milling for magnetic heads and systems formed thereby February 8, 2011
A method according to one embodiment includes ion milling at a first angle of greater than about 25 degrees from normal relative to a media facing side of a thin film region of a magnetic head or component thereof for recessing the thin film region at about a constant rate for films of
7863587 Symmetrical shaper for an ion beam deposition and etching apparatus January 4, 2011
A shaper for shaping an ion beam and that can be used for both deposition and etching is described. The shaper includes a plate that is placed between an ion beam grid and an ion beam source. The plate covers holes in the grid, and is shaped and dimensioned such that the plate does not
7851138 Patterning a surface comprising silicon and carbon December 14, 2010
Patterning a surface, comprising at least one feature having silicon coupled to a substrate, is described herein. In one embodiment a method is described for patterning a surface which comprises at least one feature having silicon and at least one feature having carbon coupled to a s
7741003 Photoresist transfer pads June 22, 2010
A resist transfer pad and method of use are described for forming a uniform photoresist on the surface of a workpiece such as a slider. The resist transfer pad includes a layer of cured polydimethylsiloxane (PDMS) on a cushioning layer, e.g. silicone rubber, and an optional stiffening
7560225 Method of forming uniform features using photoresist July 14, 2009
A process for ion milling using photoresist as a mask is described. In a preferred embodiment the invention is used in the fabricating air-bearing features on sliders for use in magnetic storage devices. According to the invention the photoresist (liquid or dry) is applied, developed and
7481312 Direct cooling pallet assembly for temperature stability for deep ion mill etch process January 27, 2009
Embodiments of the present invention are directed to a frame component of a pallet assembly. In one embodiment, the frame comprises a plurality of arms for retaining at least one carrier component. The frame further comprises at least one spring disposed upon one of the plurality of arms
7396636 Segmented resist islands for photolithography on single sliders July 8, 2008
A method for creating segmented resist islands for photolithography on single sliders is disclosed. The method includes ramping the temperature of a number of single sliders, to a temperature that is below a proper softbake temperature. The single sliders reside in a divider and the
7300556 Method for depositing a thin film adhesion layer November 27, 2007
A method of physical vapor deposition (PVD) is disclosed in which xenon is used as the operating gas in the vacuum chamber in the deposition of an adhesion layer, preferably silicon, which allows the adhesion layer to be ultra-thin with improved durability over prior art films. The use o
7296420 Direct cooling pallet tray for temperature stability for deep ion mill etch process November 20, 2007
Embodiments of the present invention are directed to a pallet assembly which facilitates direct cooling of the wafer carrier. In one embodiment, the pallet assembly comprises a frame which holds at least one carrier of a component. The pallet assembly further comprises a tray which is
7236328 Method for producing a transducer slider with tapered edges June 26, 2007
The present invention relates to a method for producing a transducer slider. The method involves first coating a substrate with a radiation-sensitive layer and exposing the radiation-sensitive layer to radiation according to an intensity pattern. Preferably, the intensity pattern is
7191508 Method for manufacturing thin-film magnetic head sliders March 20, 2007
A method for manufacturing thin-film magnetic head sliders is disclosed. Initially, an elastic layer, which may be made of poly-dimethyl siloxane (PDMS), is spun on a wafer and is thermally cured. Then, a resist layer is spun on the elastic layer. Both the resist layer and the elastic la
7137190 Method for fabricating a magnetic transducer with a corrosion resistant layer on metallic thin f November 21, 2006
A process is described for fabricating magnetic transducers with metallic thin films with a corrosion resistant surface produced by exposing the thin films to a nitrogen in a plasma chamber. The exposure to the nitrogen is believed to increase the corrosion resistance of the metallic
6969625 CMP assisted liftoff micropatterning November 29, 2005
A method and structure for a microelectronic device comprises a first film over a substrate, a first polish resistant layer over the first film, a second film over the first polish resistant layer, a second polish resistant layer over the second film, wherein the first and second polish
6858909 CMP assisted liftoff micropatterning February 22, 2005
A method and structure for a microelectronic device comprises a first film over a substrate, a first polish resistant layer over the first film, a second film over the first polish resistant layer, a second polish resistant layer over the second film, wherein the first and second polish
6793778 Method of fabricating slider pads for a transducer operating with moving magnetic media September 21, 2004
A method for fabricating a transducer with landing pads without edge fences is described. Preferably an adhesion layer and then the pad layer are deposited in voids in a photoresist. The thickness of the masking layer on the surface of the pad layer should be sufficient to protect pad la
6780341 Apparatus and method for enhancing the uniform etching capability of an ion beam grid August 24, 2004
A shaper for an ion beam gun has a thin, flat plate with a non-symmetrical profile including notches and tabs. The shaper is mounted to the surface of an ion beam grid having an array of holes. The shaper is oriented radially on the grid and covers some of the holes in the grid. The grid
6663747 Apparatus and method for enhancing the uniform etching capability of an ion beam grid December 16, 2003
A shaper for an ion beam gun has a plate with a non-symmetrical profile including notches and tabs. The shaper is mounted to the surface of an ion beam grid having an array of holes. The shaper is oriented radially on the grid and covers some of the holes in the grid. The grid is mounted
6623652 Reactive ion etching of the lapped trailing edge surface of a slider September 23, 2003
A method of altering the topography of a trailing edge or ABS of a slider is disclosed, the slider having a substrate surface, at least one magnetic recording head on top of the alumina, and an overcoat of a material, preferably SiO.sub.2. The steps include first applying an SiO.sub.2
6569295 Method for grading surface topography for improved step coverage and planarization May 27, 2003
A method is provided for grading the surface topography of a surface to improve step coverage for an overcoat. In accordance with one aspect of the present invention, an ABS of a slider and sensitive element of a magnetic head is graded to provide better step coverage of an overcoat of
6532134 Silicon coating on air bearing surface for magnetic thin film heads March 11, 2003
A silicon coating on an air bearing surface for magnetic thin film heads. A thick silicon layer is provided to replace metallic layers such as TiW as an overcoat for thin film heads. The silicon layer will provide a durable head-disk interface and act as a reflective surface for fly heig
6519118 Read head with read track width defining layer that planarizes the write gap layer of a write he February 11, 2003
A read track width defining layer is employed for defining first and second side edges of a read sensor. The read track width defining layer preferably remains in the head to planarize the read head at first and second hard bias and lead layers so as to overcome a problem of write gap
6503406 Method for forming the air bearing surface of a slider using nonreactive plasma January 7, 2003
The invention relates to a method for producing magnetic sliders having a permanent protective coating of carbon over the air bearing surface. The method comprises the steps of: (a) depositing a temporary protective coating on a surface of the slider, the temporary protective coating
6466408 Storage system slider having trailing edge pad and method for making the same October 15, 2002
A storage system slider having a trailing edge pad and method for making the same is disclosed. A trailing edge pad to provide a carbon-carbon contact between the storage medium surface and slider and by reducing the thickness of the DLC so that the magnetic spacing is reduced. A slider
6434814 Method of manufacturing a magnetic head including a read head with read track width defining lay August 20, 2002
A method of making a magnetic head that has a read head with a track width includes the steps of depositing a read track width defining material layer on a read sensor material layer; forming a bi-layer photoresist mask on the read track width defining material layer that masks a read tr
6427319 Method for protecting magnetic read/write transducers against electrostatic discharge during dis August 6, 2002
A method for protecting magnetic read/write head assembly against electrostatic discharge during disk drive manufacturing are disclosed. The magnetic head assembly is supported on a substrate having a magnetoresistive sensor element disposed in spaced relationship between several mag
6423240 Process to tune the slider trailing edge profile July 23, 2002
A method of altering the topography of a trailing edge of a slider is disclosed, the slider having a substrate surface, at least one magnetic recording head imbedded in an alumina undercoat, and a vertical axis relative to the substrate surface. The steps include first applying an al
6416935 Method for forming the air bearing surface of a slider July 9, 2002
The invention relates to a method for producing magnetic sliders having a permanent protective coating of carbon over the air bearing surface. The method comprises the steps of: (a) depositing a protective coating on a surface of the slider, the protective coating comprising an underlaye
6385011 Air bearing slider and manufacturing method therefor May 7, 2002
An air bearing slider embodiment of the present invention includes a body portion having an air bearing surface (ABS) side and a flexure surface side. The ABS side has at least one air bearing surface and at least one recessed area. A thin film composed of a compressive force material is
6346183 Use of thin carbon films as a bottom anti-reflective coating in manufacturing magnetic heads February 12, 2002
A fabrication method using a bottom anti-reflective coating (BARC) eliminating deleterious effects of unwanted reflected light during the photo exposure step of a photolithographic process. The BARC coating comprises a carbon coating having a thickness of 300 angstroms, deposited by
6328859 Method of making second pole tip of a write head with a narrow track width December 11, 2001
A method is provided for forming a final second pole tip of a write head wherein the final second pole tip is bounded in part by a final top and final first and second side walls, the final first and second side walls being separated by a final track width at an air bearing surface (ABS)
6132632 Method and apparatus for achieving etch rate uniformity in a reactive ion etcher October 17, 2000
A method and apparatus for achieving etch rate uniformity in a reactive ion etcher. The reactive ion etcher generates a plasma within a vacuum chamber for etching a substrate disposed at a cathode of a reactor can within the chamber wherein the plasma emanates from a top plate of the rea
6117283 Silicon coating on air bearing surface for magnetic thin film heads September 12, 2000
A silicon coating on an air bearing surface for magnetic thin film heads. A thick silicon layer is provided to replace metallic layers such as TiW as an overcoat for thin film heads. The silicon layer will provide a durable head-disk interface and act as a reflective surface for fly heig
6086949 Thin film protective coating with two thickness regions July 11, 2000
A thin film disk and a method for producing the disk having an overcoat with two thickness regions. The thicker overcoat region can be used as a start/stop or loading zone and the thinner overcoat region can be used over the data recording area. This provides increased wear resistance
6031695 Combined read head and write head with non-magnetic electrically conductive layer on upper pole February 29, 2000
A combined read head and write head includes at least one write coil layer embedded in an insulation stack. The insulation stack is sandwiched between first and second pole piece layers that are connected at a back gap. The pole piece layers have first and second pole tips that have edge
6027660 Method of etching ceramics of alumina/TiC with high density plasma February 22, 2000
A method of patterning a ceramic slider by plasma etching is disclosed. The ceramic slider contains alumina and titanium carbide. The method includes the steps of forming an etch pattern by depositing and developing a photoresist on the ceramic slider, and reactive ion etching a first
6023840 Method of manufacturing a thin film magnetic head having an ultrathin silicon wear coating February 15, 2000
A single layer wear coating is provided for a magnetic head assembly. The single layer is silicon or silicon-based material with a thickness in the range of 30-75 .ANG.. The single layer may be formed by a single step of deposition employing a DC magnetron. The single layer wear coating
6004473 Magnetic write head having a coil with submicron pitch December 21, 1999
A method is provided wherein first and second sacrificial layers of a write element in a merged magnetic head are provided on top of a coil material layer, wherein the first sacrificial layer serves as a mask for shaping the coil material layer into a write coil, and the second sacrifici
6001268 Reactive ion etching of alumina/TiC substrates December 14, 1999
The invention is a method of patterning the air bearing surface of a ceramic slider preferably including alumina and titanium carbide. The method includes the steps of forming an etch pattern by depositing and developing a photoresist on the ceramic slider, and reactive ion etching t
5948532 Cermet adhesion layer with carbonaceous wear layer for head/disk interfaces September 7, 1999
We disclose a bi-layer wear pad, for use in a slider/magnetic media interface, comprising a wear layer and an adhesion layer. The wear material is either carbon or a carbonaceous material. Typical carbonaceous materials useful for wear layers include elements such as hydrogen, fluori
5943187 Carbon overcoat for a slider with improved step coverage August 24, 1999
A method is provided for applying an overcoat to a slider and sensitive elements of a magnetic head which has improved coverage, reduced spacing loss and improved corrosion resistance. After lapping, an overcoat material is sputter deposited on the air bearing surface (ABS) of the sl
5926350 Dual gap horizontal thin film inductive head July 20, 1999
A dual gap horizontal thin film inductive head is provided which writes wide and reads narrow so as to avoid noise problems when reading an information track on a magnetic medium. The head has first and second gap layers between first and second horizontal pole tips. The pole tips and
5872684 Air bearing slider having a relieved trailing edge February 16, 1999
The present invention discloses a slider having an alumina overcoat layer that is etched so as to be tapered, sloped, inclined, recessed, or faceted with respect to the air-bearing surfaces of the slider. The present invention also relates to a method for eliminating overcoat protrusions
5867890 Method for making a thin film merged magnetoresistive read/inductive write head having a pedesta February 9, 1999
A method is described for making a merged thin film read/write head where a common layer serves as both a magnetic shield for the magentoresistive read element and the first pole piece for the inductive write element, and where the first pole piece thus includes a pedestal pole tip porti
5808832 Ultrathin silicon wear coating for a slider and thin film magnetic head elements at an ABS September 15, 1998
A single layer wear coating is provided for a magnetic head assembly. The single layer is silicon or silicon-based material with a thickness in the range of 30-75 .ANG.. The single layer may be formed by a single step of deposition employing a DC magnetron. The single layer wear coating
5734519 Contact magnetic recording disk file with improved head assembly March 31, 1998
A contact recording disk file uses an integrated head-suspension assembly having a head carrier with a dual-layer wear pad for contacting the disk during read and write operations. The outer wear layer of the pad is relatively soft and wear prone compared to a harder and more wear-re
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