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Inventor: H ubner; Andreas
Address: Hameln, DE
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5573592 |
Method for forming pure group III-V compound semi-conductor films |
November 12, 1996 |
| This invention discloses a method of synthesizing a Group III-V compound semi-conducting film from a Group III metal alkyl and Group V hydride wherein the method comprises providing a vacuum chamber in which the synthesis takes place, adsorbing at least one monolayer of said Group III |
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