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Inventor:
Hu; Wen-Kan
Address:
Hsinchu, TW
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
7047620 Method for assembling a scrubber May 23, 2006
The present invention relates to a method of assembling a scrubber which includes a motor, a shaft rotatably coupled to and extending through the motor, a shaft pin detachably connected to the shaft, and a disk coupled to the shaft and having a notch located relative to the shaft pin at
6658716 Method for assembling motor assembly to support wafer December 9, 2003
The present invention provides an auxiliary tool for assembling a motor assembly to a wafer-deposition machine for supporting a wafer. The auxiliary tool facilitates easy and quick assembly of the motor assembly to the wafer-deposition machine. An aspect of the present invention is d
6647607 Auxiliary tool for assembling a scrubber November 18, 2003
The present invention relates to an auxiliary tool for assembling a scrubber which includes a motor, a shaft rotatably coupled to and extending through the motor, a shaft pin detachably connected to the shaft, and a disk coupled to the shaft and having a notch located relative to the










 
 
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