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Inventor: Hu; Wen-Kan
Address: Hsinchu, TW
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7047620 |
Method for assembling a scrubber |
May 23, 2006 |
| The present invention relates to a method of assembling a scrubber which includes a motor, a shaft rotatably coupled to and extending through the motor, a shaft pin detachably connected to the shaft, and a disk coupled to the shaft and having a notch located relative to the shaft pin at |
| 6658716 |
Method for assembling motor assembly to support wafer |
December 9, 2003 |
| The present invention provides an auxiliary tool for assembling a motor assembly to a wafer-deposition machine for supporting a wafer. The auxiliary tool facilitates easy and quick assembly of the motor assembly to the wafer-deposition machine. An aspect of the present invention is d |
| 6647607 |
Auxiliary tool for assembling a scrubber |
November 18, 2003 |
| The present invention relates to an auxiliary tool for assembling a scrubber which includes a motor, a shaft rotatably coupled to and extending through the motor, a shaft pin detachably connected to the shaft, and a disk coupled to the shaft and having a notch located relative to the |
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