| Patent Number |
Title Of Patent |
Date Issued |
| 7623237 |
Sample investigating system |
November 24, 2009 |
| A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incide |
| 7616319 |
Spectroscopic ellipsometer and polarimeter systems |
November 10, 2009 |
| A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of |
| 7554662 |
Spatial filter means comprising an aperture with a non-unity aspect ratio in a system for invest |
June 30, 2009 |
| Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having a hole therethrough with a non-unity aspect ratio. |
| 7522279 |
System for and method of investigating the exact same point on a sample substrate with multiple |
April 21, 2009 |
| Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal lengths do not vary more than within an acceptable amount. |
| 7508510 |
System for and method of investigating the exact same point on a sample substrate with multiple |
March 24, 2009 |
| System for and Method of analyzing a sample at substantially the exact same small spot thereon with a plurality of wavelengths using a lens system which provides the same focal length at at least two wavelengths at various positions thereof with respect to a sample, including analyzi |
| 7468794 |
Rotating compensator ellipsometer system with spatial filter equivalent |
December 23, 2008 |
| Application of a spatial filter equivalent constructed from a converging lens and an optical fiber in rotating compensator ellipsometer systems, after a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low in |
| 7460230 |
Deviation angle self compensating substantially achromatic retarder |
December 2, 2008 |
| A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromag |
| 7450231 |
Deviation angle self compensating substantially achromatic retarder |
November 11, 2008 |
| A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromag |
| 7385697 |
Sample analysis methodology utilizing electromagnetic radiation |
June 10, 2008 |
| Simultaneous use of wavelengths in at least two ranges selected from RADIO, MICRO, FIR, IR, NIR-VIS-NUV, UV, DUV, VUV EUV, XRAY in a regression procedure to evaluate parameters in mathematical dispersion structures to model dielectric functions. |
| 7349092 |
System for reducing stress induced effects during determination of fluid optical constants |
March 25, 2008 |
| A system for determination of optical constants of liquids, including provision for reducing stress induced effects while obtaining data. |
| 7336361 |
Spectroscopic ellipsometer and polarimeter systems |
February 26, 2008 |
| A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, |
| 7327456 |
Spectrophotometer, ellipsometer, polarimeter and the like systems |
February 5, 2008 |
| Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use. |
| 7304737 |
Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiatio |
December 4, 2007 |
| Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete po |
| 7295313 |
Application of intermediate wavelength band spectroscopic ellipsometry to in-situ real time fabr |
November 13, 2007 |
| Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data over an intermediate wavelength band range around a pass or rejec |
| 7280194 |
Accurate determination of refractive indices of solid, fluid and liquid materials |
October 9, 2007 |
| Systems and methodology for determining not only precise and repeatable results, but accurate values of the refractive index of solids, fluids and liquids. |
| 7274450 |
Sample entry purge system in spectrophotometer, ellipsometer, polarimeter and the like systems |
September 25, 2007 |
| A sample sequestering system which allows access to a subspace in a chamber encompassed generally enclosed space, for use in entering and removing a sample when the subspace is opened to atmosphere. Sufficient purge gas is flowed from within the generally enclosed space into the subs |
| 7265835 |
System for implementing variable retarder capability in ellipsometer, polarimeter or the like sy |
September 4, 2007 |
| A system for implementing Berek-type variable retarder plate tipping capability in two orthogonal directions via tipping about a single axis, in combination with a means for rotating the orientation of the axis, having application in ellipsometer and polarimeter and the like systems. |
| 7245376 |
Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter |
July 17, 2007 |
| Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems. |
| 7239391 |
Method of analysis of multiple layer samples |
July 3, 2007 |
| Spectroscopic ellipsometer system(s) mediated methodology for quantifying layer defining parameters in mathematical models of samples which contain a plurality of layers of different materials, at least some of which are absorbing of electromagentic radiation, wherein an acquired data se |
| 7215424 |
Broadband ellipsometer or polarimeter system including at least one multiple element lens |
May 8, 2007 |
| Quasi-achromatic multi-element lens(es) which are precisely mounted with respect to one another in a tubular mounting fixture, and the application thereof in focusing, (and optionally re-colliminating), a spectroscopic electromagnetic beam into a very small, chromatically relatively |
| 7193710 |
Rotating or rotatable compensator spectroscopic ellipsometer system including multiple element l |
March 20, 2007 |
| Disclosed are spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition, and at least one continuously rotating or step-wise rotatable compensator which transmits an electromagnetic beam therethrough and |
| 7193708 |
Time efficient method for investigating sample systems with spectroscopic electromagnetic radiat |
March 20, 2007 |
| Time efficient methodology for investigating a sample system using electromagnetic wavelengths which are not absorbed by oxygen and/or water vapor during evacuation or purging of a substantially enclosed space in which is present the sample system, followed by using wavelengths which |
| 7158231 |
Spectroscopic ellipsometer and polarimeter systems |
January 2, 2007 |
| A spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, |
| 7151605 |
Methodology for providing good data at all wavelengths over a spectroscopic range |
December 19, 2006 |
| Disclosed is methodology for obtaining data of improved precision, including detection and replacement of data determined to be suspect to provide good data over a spectroscopic range of wavelengths. |
| 7136162 |
Alignment of ellipsometer beam to sample surface |
November 14, 2006 |
| Disclosed is a system and method of aligning, preferably by an automated procedure, a beam of electromagnetic radiation provided by a source thereof so that it approaches a sample at a specific location upon its surface, at a known angle, then reflects therefrom and enters a data det |
| 7075649 |
Discrete polarization state rotatable compensator spectroscopic ellipsometer system, and method |
July 11, 2006 |
| Disclosed are spectroscopic ellipsometer and combined spectroscopic reflectometer/ellipsometer systems. The spectroscopic ellipsometer system portion includes polarizer and analyzer elements which remain fixed in position during data acquisition, and a step-wise rotatable compensator |
| 7057717 |
System for and method of investigating the exact same point on a sample substrate with at least |
June 6, 2006 |
| Disclosed are system for and method of analyzing the substantially the exact same point on a sample system with at least two wavelengths, or at least two ranges of wavelengths for which the focal lengths do not vary more than within an acceptable amount. |
| 6982792 |
Spectrophotometer, ellipsometer, polarimeter and the like systems |
January 3, 2006 |
| Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use. |
| 6950182 |
Functional equivalent to spatial filter in ellipsometer and the like systems |
September 27, 2005 |
| Disclosed is the application of a functional equivalent to a spatial filter in ellipsometer and the like systems. Included are demonstrated multi-element converging lens systems which focus an electromagnetic beam onto a fiber optic. The purpose is to eliminate a radially outer annulus |
| 6940595 |
Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alt |
September 6, 2005 |
| Disclosed is application of oblique angle of incidence, reflection and/or transmission mode spectroscopic ellipsometry PSI and/or DELTA, (including combinations thereof and/or mathematical equivalents), vs. wavelength data to monitor and/or control fabrication of multiple layer high/low |
| 6937341 |
System and method enabling simultaneous investigation of sample with two beams of electromagneti |
August 30, 2005 |
| Disclosed are system and method for characterizing a system consisting of a fluid sample on a two sided stage, utilizing data obtained by applying, from both sides thereof, beams of electromagnetic radiation to a fluid coated surface in a containing cell volume. The beams can have the sa |
| 6930813 |
Spatial filter source beam conditioning in ellipsometer and the like systems |
August 16, 2005 |
| Disclosed is the application of spatial filters and beam energy homogenizing systems in ellipsometer and the like systems prior to a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary intensity profile, so that electromagnetic beam intensity |
| 6831740 |
Methodology for improving precision of data acquired by spectrophotometer systems |
December 14, 2004 |
| Disclosed are spectrophotometer systems and methodology for obtaining data of improved precision therefrom, including replacement of data determined to be suspect based on comparison of multiple baselines. |
| 6822738 |
Spectroscopic rotating compensator ellipsometer system with pseudo-achromatic retarder system |
November 23, 2004 |
| Disclosed is a spectroscopic Ellipsometer having pseudo-achromatic compensator(s) having fast axes which vary with wavelength and which provide, a range of retardations, (that is, maximum retardance minus minimum retardance), of less than 90 degrees over a range of wavelengths, said |
| 6804004 |
Multiple-element lens systems and methods for uncorrelated evaluation of parameters in parameter |
October 12, 2004 |
| Disclosed are multi-element lenses which demonstrate reduced achromatic focal length and reduced electromagentic beam spot size dispersal effects in ellipsometer and polarimeter systems. Also disclosed is methodology for evaluating parameters in parameterized equations which enables calc |
| 6795184 |
Odd bounce image rotation system in ellipsometer systems |
September 21, 2004 |
| Disclosed is an odd bounce image rotating system with a sequence of an odd number of reflecting elements, such that a polarized electromagnetic beam caused to enter, reflectively interacts with the odd number of reflecting elements and exits along an essentially non-deviated, non-displac |
| 6549282 |
Methods for uncorrelated evaluation of parameters in parameterized mathematical model equations |
April 15, 2003 |
| Disclosed are ellipsometer and polarimeter systems which have multi-element input and output lenses that demonstrate essentially the same focal length at each wavelength in a spectroscopic range of wavelengths. |
| 6483586 |
Beam splitting analyzer means in rotating compensator ellipsometer |
November 19, 2002 |
| Disclosed is a rotating compensator sample system investigation system which includes a source of a beam of electromagnetic radiation, a polarizer, a stage for supporting a sample system, a beam splitting analyzer, and at least two detector systems which are positioned each to interc |
| 6456376 |
Rotating compensator ellipsometer system with spatial filter |
September 24, 2002 |
| Disclosed is the application of spatial filter(s) in rotating compensator ellipsometer systems prior to or after a sample system. The purpose is, for instance, to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular |
| 6455853 |
Determination of thickness and impurity profiles in thin membranes utilizing spectorscopic data |
September 24, 2002 |
| Disclosed is spectroscopic ellipsometer system mediated methodology for quantifying thickness and impurity profile defining parameters in mathematical models of impurity profile containing thin membranes having two substantially parallel surfaces which are separated by a thickness, w |
| 6441902 |
Method for evaluating sample system anisotropic refractive indices and orientations thereof in m |
August 27, 2002 |
| Disclosed is a method of evaluating sample system anisotropic refractive indices, and orientations thereof with respect to an alignment surface, in multiple dimensions. The preferred method involves a sequence of steps which allows overcoming mathematical model parameter correlation duri |
| 6353477 |
Regression calibrated spectroscopic rotating compensator ellipsometer system with pseudo-achroma |
March 5, 2002 |
| A Spectroscopic Rotating Compensator Material System Investigation System including a Dual Waveplate Pseudo-Achromatic Compensator System, and a Photo-Array for simultaneously detecting a Multiplicity of Wavelengths, is disclosed. The Spectroscopic Rotating Compensator Material System |
| 6141102 |
Single trianglular shaped optical retarder element for use in spectroscopic ellipsometer and pol |
October 31, 2000 |
| Disclosed is a triangular shaped retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation. The triangular shaped element, as viewed in side elevation, has first and second sides which project to the left and right and downward from a |
| 6137618 |
Compact, high extinction coefficient combination brewster angle and other than brewster angle po |
October 24, 2000 |
| Disclosed is an electromagnetic beam polarizer system which provides a sequential combination of a Brewster Angle and other than Brewster Angle polarizer system in combination with reflective mirrors, which elements are arranged in any functional order. The electromagnetic beam polarizer |
| 6118537 |
Multiple tipped berek plate optical retarder elements for use in spectroscopic ellipsometer and |
September 12, 2000 |
| Disclosed are retarder systems, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second Berek-type retarders which each present with first and second essentially parallel sides. The first and second Berek-type retarders are |
| 6100981 |
Dual horizontally oriented triangle shaped optical retarder element for use in spectroscopic ell |
August 8, 2000 |
| A retarder system, for entering retardation between orthogonal components of an electromagnetic beam of radiation, having first and second triangular shaped elements arranged so that the first triangular shaped element, as viewed in side elevation, presents with first and second sides |
| 6084675 |
Adjustable beam alignment compensator/retarder with application in spectroscopic ellipsometer an |
July 4, 2000 |
| Disclosed is a compensator/retarder system which allows adjustment to eliminate introduction of significant deviation and/or displacement into the propagation direction of a beam of electromagnetic radiation caused to interact therewith, even when the present invention retarder system is |
| 6084674 |
Parallelogram shaped optical retarder element for use in spectroscopic ellipsometer and polarime |
July 4, 2000 |
| A retarder system and method of its use in ellipsometers and polarimeters are disclosed. The retarder system is a parallelogram shaped element which, as viewed in side elevation, has top and bottom sides which are parallel to one another. The retarder system also has right and left sides |
| 6034777 |
Methods for uncorrelated evaluation of parameters in parameterized mathematical model equations |
March 7, 2000 |
| Disclosed is a method for evaluating parameters in parameterized equations for independently calculating retardence entered to orthogonal components in a beam of electromagnetic radiation which is caused to pass through spatially separated input and output windows, by each of said input |
| 5963327 |
Total internal reflection electromagnetic radiation beam entry to, and exit from, ellipsometer, |
October 5, 1999 |
| Disclosed are laterally compact ellipsometer, polarimeter, reflectometer and the like material system investigating systems, and methods for their use. Input and output optical elements effect changes in orientation, (propagation direction), of a beam of electromagnetic radiation caused |
