| Patent Number |
Title Of Patent |
Date Issued |
| 7516896 |
Frequency tunable resonant scanner with auxiliary arms |
April 14, 2009 |
| A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from an oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to change the moment of inertia of the |
| 7485485 |
Method and apparatus for making a MEMS scanner |
February 3, 2009 |
| Devices are formed on a semiconductor wafer in an interdigitated relationship and are released by deep reactive ion etching. MEMS scanners are formed without a surrounding frame. Mounting pads extend outward from torsion arms. Neighboring MEMS scanners are formed with their mounting |
| 7473888 |
Display with compensated light source drive |
January 6, 2009 |
| A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to |
| 7310174 |
Method and apparatus for scanning regions |
December 18, 2007 |
| A beam scanner is operable to scan light in two or more axes, typically in a raster pattern that includes a fast scan axis and a slow scan axis. Plural beams of light are scanned, each beam of light producing a scanned region that at least partially overlaps at least one adjoining scanne |
| 7157679 |
Scanned beam display having compensation for pattern dependant heating of a light source |
January 2, 2007 |
| A scanned beam display includes compensation for pattern-dependant heating of a light source. According to some embodiments, received image data is transformed to corrected data that compensates for pattern-dependent heating of one or more light sources. |
| 7002716 |
Method and apparatus for blending regions scanned by a beam scanner |
February 21, 2006 |
| A beam scanner is operable to scan light in two or more axes, typically in a raster pattern that includes a fast scan axis and a slow scan axis. Plural beams of light are scanned, each beam of light producing a scanned region that at least partially overlaps at least one adjoining scanne |
| 6924476 |
Resonant beam scanner with raster pinch compensation |
August 2, 2005 |
| A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to |
| 6882462 |
Resonant scanner with asymmetric mass distribution |
April 19, 2005 |
| A micro-electromechanical system (MEMS) scanner may be used in a range of systems including a scanned beam display or a scanned beam image capture system. The MEMS scanner may include provision for movement or oscillation in two or more axes. A mass asymmetry is introduced to the scanner |
| 6687034 |
Active tuning of a torsional resonant structure |
February 3, 2004 |
| A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from a oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to shift the moment of inertia of the |
| 6654158 |
Frequency tunable resonant scanner with auxiliary arms |
November 25, 2003 |
| A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from an oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to change the moment of inertia of the |
| 6653621 |
Frequency tunable resonant scanner and method of making |
November 25, 2003 |
| A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to e |
| 6535325 |
Frequency tunable resonant scanner with auxiliary arms |
March 18, 2003 |
| A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from an oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to change the moment of inertia of the |
| 6515278 |
Frequency tunable resonant scanner and method of making |
February 4, 2003 |
| A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to |
| 6512622 |
Active tuning of a torsional resonant structure |
January 28, 2003 |
| A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from a oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to shift the moment of inertia of the o |
| 6384406 |
Active tuning of a torsional resonant structure |
May 7, 2002 |
| A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from a oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to shift the moment of inertia of the o |
| 6285489 |
Frequency tunable resonant scanner with auxiliary arms |
September 4, 2001 |
| A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from an oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to change the moment of inertia of the |
| 6256131 |
Active tuning of a torsional resonant structure |
July 3, 2001 |
| A MEMs scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a flexible arm that extends from a oscillatory body. An electrical field applies a force to the flexible arm, thereby bending the flexible arm to shift the moment of inertia of the o |
| 6245590 |
Frequency tunable resonant scanner and method of making |
June 12, 2001 |
| A MEM s scanning device has a variable resonant frequency. In one embodiment, the MEMs device includes a torsion arm that supports an oscillatory body. In one embodiment, an array of removable masses are placed on an exposed portion of the oscillatory body and selectively removed to |
| 5656777 |
Miniature box vibrating gyroscope |
August 12, 1997 |
| An open top box structure is micromachined on a base, such as a crystalline silicon substrate, and drive and sensing devices are fabricated on the same substrate. Output transducers sense Coriolis force changes by processing signals representing force components at the corners of the |
