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Inventor:
Hayashi; Teruyuki
Address:
Nirasaki, JP
No. of patents:
11
Patents:












Patent Number Title Of Patent Date Issued
8268185 Method for analyzing quartz member September 18, 2012
A method of analyzing a quartz member includes the step of supplying an etchant to the quartz member so as to etch the quartz member. The method also includes analyzing the etchant used in the supplying step. The etchant is supplied to a concave etchant receiving portion that is formed
8040504 Defect inspecting method and defect inspecting apparatus October 18, 2011
Provided is a method and apparatus for inspecting a defect of a shape formed on a substrate. Primary inspection is sequentially performed on specific patterns in a plurality of divided regions of the substrate by using an optical method, and one or more regions on which secondary ins
7993458 Vacuum processing apparatus and method August 9, 2011
A gas exhaust unit evacuates the inside of a vacuum transfer chamber at a constant exhaust rate. An gas exhaust valve is kept normally open, and a purge gas (N.sub.2 gas) is supplied from a purge gas supply source into the vacuum transfer chamber via a mass flow controller (MFC) and an
7946152 Apparatus and method for measuring the concentration of organic gas May 24, 2011
In a measuring apparatus, an atmosphere to be inspected taken out from a space to be inspected in a processing system is analyzed for organic gas concentration. The apparatus is provided with a collector having an approach connected to the space to be inspected. The collector is conn
7923680 Analysis method and analysis apparatus April 12, 2011
An analysis apparatus includes a first process part for removing a film formed on a substrate by irradiating the film with ultraviolet light, a second process part for providing a solution onto a surface of the substrate for dissolving an object being analyzed on the substrate, and a
7883582 Vacuum processing apparatus and method February 8, 2011
A gas exhaust unit evacuates the inside of a vacuum transfer chamber at a constant exhaust rate. An gas exhaust valve is kept normally open, and a purge gas (N.sub.2 gas) is supplied from a purge gas supply source into the vacuum transfer chamber via a mass flow controller (MFC) and an
7508518 Particle measuring method and particle measuring apparatus March 24, 2009
The present invention relates to a particle measuring method for irradiating light to a surface of a substrate to scatter the light so as to measure a condition of particles on the substrate based on the scattered light. The particle measuring method according to the present inventio
7420118 Electric wire and cable with coating/covering of polyvinyl chloride family resin composition September 2, 2008
An electric wire with coating of polyvinyl chloride family resin composition is disclosed which has a coating layer containing a polyvinyl chloride family resin composition comprising polyvinyl chloride family resin and one or more compounds selected from calcium soap, zinc soap and
7208428 Method and apparatus for treating article to be treated April 24, 2007
A thermal treatment apparatus 1 includes a reaction tube 2 for containing wafers 10 contaminated with organic substances having a heater 12 capable of heating the reaction tube; a first gas supply pipe 13 for carrying oxygen gas into the reaction tube 2; and a second gas supply pipe 14 f
6903264 Electric wire coated with polyvinyl chloride resin composition and cable June 7, 2005
An electric wire with coating of polyvinyl chloride family resin composition is characterized by having a coating layer including polyvinyl chloride family composition obtained from adding more than one of any calcium soap, zinc soap and hydrotalcite to resin including polyvinyl chlo
6537347 Method for deciding on the timing of replacing a chemical filter, filter life detection sensor, March 25, 2003
A chemical filter unit 10 is made of a chemical filter 12 and a filter life detection sensor 1. The filter life detection sensor 1 is provided with an adsorption state detection sensor 3 and a reference sensor 4 to which a flow of air is blocked. The sensors 3 and 4 are made of the same










 
 
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