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Inventor: Harvell, legal representative; Olive
Address: Sudbury, MA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7155919 |
Cryopump temperature control of arrays |
January 2, 2007 |
| An electronic controller maintains the operating temperature of a cryopump by controlling a heater coupled to the cryopump. The heater is coupled to a cryopumping surface of the cryopump. The controller can control the operation of the heater in response to feedback from temperature sens |
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