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Sudbury, MA
No. of patents:

Patent Number Title Of Patent Date Issued
7155919 Cryopump temperature control of arrays January 2, 2007
An electronic controller maintains the operating temperature of a cryopump by controlling a heater coupled to the cryopump. The heater is coupled to a cryopumping surface of the cryopump. The controller can control the operation of the heater in response to feedback from temperature sens

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