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Inventor: Hargrove; William L.
Address: Sherwood, OR
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| RE38674 |
Process for forming a thin oxide layer |
December 21, 2004 |
| A novel process for forming a robust, sub-100 .ANG. oxide is disclosed. Native oxide growth is tightly controlled by flowing pure nitrogen during wafer push and nitrogen with a small amount of oxygen during temperature ramp and stabilization. First, a dry oxidation is performed in oxygen |
| 5358891 |
Trench isolation with planar topography and method of fabrication |
October 25, 1994 |
| A method of forming and refilling a trench in a substrate. First a trench is formed in the substrate. The trench is then refilled with a conformal material. Next, a recess is etched into the top portion of the refilled trench. The recess is then refilled with a second material until the |
| 5244843 |
Process for forming a thin oxide layer |
September 14, 1993 |
| A novel process for forming a robust, sub-100 .ANG. oxide is disclosed. Native oxide growth is tightly controlled by flowing pure nitrogen during wafer push and nitrogen with a small amount of oxygen during temperature ramp and stabilization. First, a dry oxidation is performed in oxygen |
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