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Inventor: Halpin; Mike
Address: Phoenix, AZ
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6325858 |
Long life high temperature process chamber |
December 4, 2001 |
| A generally horizontally-oriented quartz CVD chamber is disclosed with front and rear chamber divider plates adjacent a centrally positioned susceptor and surrounding temperature control ring which divide the chamber into upper and lower regions. Improvement to the lifetime of CVD pr |
| 6068441 |
Substrate transfer system for semiconductor processing equipment |
May 30, 2000 |
| A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either |
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