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Inventor:
Grant; Casey Jon
Address:
Hinesburg, VT
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
8129095 Methods, photomasks and methods of fabricating photomasks for improving damascene wire uniformit March 6, 2012
A method of improving damascene wire uniformity without reducing performance. The method includes simultaneously forming a multiplicity of damascene wires and a multiplicity of metal dummy shapes in a dielectric layer of a wiring level of an integrated circuit chip, the metal dummy s










 
 
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