| Patent Number |
Title Of Patent |
Date Issued |
| 6435809 |
Dual arm linear hand-off wafer transfer assembly |
August 20, 2002 |
| A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of the arms can be positioned over the other arm and handed off. In one version, a Bernoulli- |
| 6435799 |
Wafer transfer arm stop |
August 20, 2002 |
| A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of the arms can be positioned over the other arm and handed off. In one version, a Bernoulli- |
| 6293749 |
Substrate transfer system for semiconductor processing equipment |
September 25, 2001 |
| A system for facilitating wafer transfer comprises a susceptor unit consisting of an inner susceptor section which rests within an outer susceptor section. A vertically movable and rotatable support spider located beneath the susceptor unit can rotate into positions to engage either |
| 6183183 |
Dual arm linear hand-off wafer transfer assembly |
February 6, 2001 |
| A dual-arm wafer hand-off assembly includes a pair of pickup arms for transferring wafers within a wafer processing system. The two pickup arms are adapted to move such that the wafer on one of the arms can be positioned over the other arm and handed off. In one version, a Bernoulli- |
| 5997588 |
Semiconductor processing system with gas curtain |
December 7, 1999 |
| A gas curtain for use with a semiconductor processing system to prevent unwanted gases from entering a processing chamber. The gas curtain includes both upward and downward flows of gas surrounding an isolation valve adjacent a delivery port into the processing chamber. In the valve |
