| Patent Number |
Title Of Patent |
Date Issued |
| 8120763 |
Device and method for the optical measurement of an optical system by using an immersion fluid |
February 21, 2012 |
| A device for the optical measurement of an optical system, in particular an optical imaging system, is provided. The device includes at least one test optics component arranged on an object side or an image side of the optical system. An immersion fluid is adjacent to at least one of the |
| 7760345 |
Method and apparatus for determining at least one optical property of an imaging optical system |
July 20, 2010 |
| A method and an apparatus for determining at least one optical property of an imaging optical system which is designed to image an object disposed in an object plane of the optical system into an assigned image plane. The method includes disposing at least one test structure in the objec |
| 7417745 |
Device and method for wavefront measurement of an optical imaging system by means of phase-shift |
August 26, 2008 |
| Device and method for wavefront measurement of an optical imaging system by means of phase-shifting interferometry, having a mask structure (6a) to be arranged on the object side, and/or a grating structure (7a) to be arranged on the image side. The object-side mask structure includes on |
| 7336371 |
Apparatus and method for measuring the wavefront of an optical system |
February 26, 2008 |
| A device and a method for wavefront measurement of an optical system (7), in particular by an interferometric measurement technique. A dynamic range correction element (12, 12a) is arranged in the beam path upstream of the detector arrangement (11) and is designed such that the variation |
