| Patent Number |
Title Of Patent |
Date Issued |
| 8222885 |
Isolating a control signal source in a high frequency power supply |
July 17, 2012 |
| A high frequency power supply, in particular a plasma supply device, for generating an output power greater than 1 kW at a basic frequency of at least 3 MHz with at least one switch bridge, which has two series connected switching elements, wherein one of the switching elements is co |
| 8154897 |
RF power supply |
April 10, 2012 |
| An RF power supply, in particular a plasma supply device, for generating an output power greater than 500 W at an output frequency of at least 3 MHz includes at least one inverter connectable to a DC power supply, which inverter comprises at least one switching element and an output |
| 8129653 |
Plasma supply device |
March 6, 2012 |
| A plasma supply device generates an output power greater than 500 W at an essentially constant basic frequency greater than 3 MHz and powers a plasma process to which is supplied the generated output power, and from which reflected power is returned to the plasma supply device. The plasm |
| 7705676 |
Class D amplifier arrangement |
April 27, 2010 |
| An amplifier arrangement for operation at supply voltages of at least 100V and at output powers of at least 1 kW includes a half-bridge formed from two switching elements connected in series, two supply voltage terminals, and an output connection between the switching elements. A bypass |
| 7609740 |
Method and arrangement for the excitation of a gas laser arrangement |
October 27, 2009 |
| For exciting a gas laser arrangement with a plurality of HF signals, at least two pulsed HF signals are generated arid at least two electrodes or pairs of electrodes of the gas laser arrangement are supplied with the pulsed HF signals, respectively. At least two of the electrodes or pair |
| 7512387 |
Method and control system for controlling the output power of an RF amplifier system |
March 31, 2009 |
| A system for controlling a power supplied to a load from a radio frequency amplifier system includes a radio frequency signal generator adapted for generating a radio frequency signal, an amplifier to which the radio frequency signal is supplied and that amplifies the radio frequency |
| 6970042 |
Power control for high frequency amplifiers |
November 29, 2005 |
| A method of controlling an input voltage of a high frequency amplifier includes measuring power supplied to a load, determining a first control variable for a series element disposed upstream from the high frequency amplifier based on the measured power and a given set point, and det |
