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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Gianchandani; Yogesh B.
Address:
Madison, WI
No. of patents:
11
Patents:












Patent Number Title Of Patent Date Issued
6951798 Method of bonding a stack of layers by electromagnetic induction heating October 4, 2005
A method of bonding multiple layers is provided. The method includes the steps of stacking the multiple layers on top of each other and volumetrically heating the stack of multiple layers to a predetermined temperature. It is preferred that the stack is heated by electromagnetic indu
6827870 Method and apparatus for etching and deposition using micro-plasmas December 7, 2004
Plasma etching or deposition is performed over substrates using spatially localized micro-plasmas operating in parallel with each other. A plasma generating electrode is positioned closely adjacent to an exposed surface of the substrate, as on the surface of a dielectric layer applied to
6686998 Method and apparatus for glow discharges with liquid microelectrodes February 3, 2004
Glow discharge apparatus having liquid electrodes includes a substrate with a top surface on which cathode and anode electrodes are formed. The cathode electrode may be formed with a cathode terminal port formed to hold a liquid which is spaced from the anode electrode by an inter-el
6624377 Micro-electro-discharge machining method and apparatus September 23, 2003
A micro-electro-discharge machining apparatus includes a substrate, a plurality of electrically conductive electrodes on the substrate arranged in an array, and a plurality of electrical interconnect lines formed on the substrate extending to one or more of the electrodes. An electrical
6619123 Micromachined shock sensor September 16, 2003
A micromachined shock sensor has a substrate with a surface on which are formed an array of acceleration sensing units. Each sensing unit has a mount fixed to the substrate, a cantilever beam extending from the mount, and a proof mass fixed to the cantilever beam and supported above the
6607305 Bi-directional micromechanical latching linear actuator August 19, 2003
A micromechanical actuator includes a plunger, having two magnet heads spaced from each other and joined to move together, that is supported for linear movement on a substrate. A magnetic core is supported on the substrate and has gaps in the core adjacent to the heads of the plunger.
6606913 Micromachined strain sensor August 19, 2003
A micromachined strain sensor can be incorporated in a sealed package with other microelectrical and micromechanical components, with the residual strain being monitored electronically from outside the package to allow strain to be monitored during production and during the life of the
6594994 Micromechanical actuation apparatus July 22, 2003
Micromechanical actuation apparatus includes a substrate with an actuator mounted on the substrate and a micro-transmission mounted on the substrate coupled to the electrothermal actuator. The actuator, such as an electrothermal actuator, is responsive to electrical power to drive two
6470754 Sealed capacitive pressure sensors October 29, 2002
A micromachined pressure sensor is formed with a minimum number of masking and processing steps. The structure measures changes in pressure by deflection of structures having capacitive plates external to a sealed cavity so that electrical leads can be readily connected to the plates
6460234 Method of forming micromachined sealed capacitive pressure sensors October 8, 2002
A micromachined pressure sensor is formed with a minimum number of masking and processing steps. The structure measures changes in pressure by deflection of structures having capacitive plates external to a sealed cavity so that electrical leads can be readily connected to the plates
6377718 Micromechanical phase-shifting gate optical modulator April 23, 2002
A micromechanical optical modulator includes an input optical waveguide that projects a beam across a gap to an output optical waveguide. A phase shifting gate is mounted between the input and output optical waveguides and has a light transmissive panel which may have at least two sectio










 
 
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