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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Fujiwara; Yoshinori
Address:
Yamato, JP
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
6897415 Workpiece stage of a resist curing device May 24, 2005
A workpiece stage of a resist curing device is devised in which a workpiece on which a resist has been applied is held on a workpiece stage by vacuum suction, in which the workpiece is irradiated with UV radiation with a simultaneous temperature increase, in which it is cooled after UV










 
 
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