A pattern inspection apparatus has a setting unit of a plurality of cell areas A and B of different cell comparison pitches and inspects the plurality of cell areas of the different cell comparison pitches in accordance with settings of the setting unit. As information to read out im
An image processing apparatus for wafer inspection tool that is able to perform continuously cell to cell comparison inspection, die to die comparison inspection, and cell-to-cell and die-to-die hybrid comparison inspection, employing a plurality of processors. This image processing
A micro-controller includes a dictionary memory for storing instruction codes which appear in a program, and a compressed code memory for storing compressed codes each converted from each of the instruction codes included in the program. Each compressed code has a word length suffici
A micro-controller includes a dictionary memory for storing instruction codes which appear in a program, and a compressed code memory for storing compressed codes each converted from each of the instruction codes included in the program. Each compressed code has a word length suffici