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Freischlad; Klaus Reinhard
Tucson, AZ
No. of patents:

Patent Number Title Of Patent Date Issued
7605913 System and method for inspecting a workpiece surface by analyzing scattered light in a front qua October 20, 2009
A surface inspection system, as well as related components and methods, are provided. The surface inspection system includes a beam source subsystem, a beam scanning subsystem, a workpiece movement subsystem, an optical collection and detection subsystem, and a processing subsystem.

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