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Inventor: Etou; Hiroki
Address: Kumamoto, JP
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7554104 |
Bolt and semiconductor manufacturing apparatus |
June 30, 2009 |
| A bolt includes a main body and a spring pin. The main body includes a head and a shaft. The spring pin includes a base portion and an end portion. The shaft includes a portion of external thread and a hollow portion. The head includes a top surface and a hole opened in the top surfa |
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