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Elisha; Yehuda
Kfar Vradim, IL
No. of patents:

Patent Number Title Of Patent Date Issued
6566169 Method and apparatus for local vectorial particle cleaning May 20, 2003
Particles are removed from the surface of a substrate. Respective position coordinates of the particles on the surface are determined. A beam of electromagnetic energy is directed at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at
6172349 Autofocusing apparatus and method for high resolution microscope system January 9, 2001
A method and apparatus for automatically focusing a high resolution microscope, wherein during setup the operator designates areas within each field of view where a measurement will be taken, and for each area of interest translates the microscope along its optical axis (Z-axis) while

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