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Inventor: Eacobacci; Michael J.
Address: Weymouth, MA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6022195 |
Electronically controlled vacuum pump with control module |
February 8, 2000 |
| A vacuum system comprises, as an integral assembly, a vacuum pump with drive motor, a purge valve, a roughing valve and an electronic control module. A cryogenic vacuum pump and a turbomolecular vacuum pump are disclosed. The control module has a programmed processor for controlling |
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