A cryopump having a cryopump chamber includes a purge gas valve coupled to the cryopump chamber for supplying a first quantity of warm gas to the cryopump chamber in order to purge the cryopump chamber during regeneration. A roughing valve couples the cryopump chamber to a roughing p
The cryopanel of a cryopump can be preferentially defrosted to remove an acid-forming or toxic gas while leaving a second gas substantially condensed upon the cryopanel thereby limiting interaction between the vapor phases of the two gases. The cryopanel is warmed to a temperature wi
A method for regulating the cooldown of multiple cryogenic refrigerators supplied with compressed refrigerant from a common compressor includes the following steps. The cooldown of the refrigerators is monitored. The cooldown of at least one refrigerator is then governed to regulate the
