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Inventor: Eacobacci, Jr.; Michael J.
Address: South Attleboro, MA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6510697 |
System and method for recovering from a power failure in a cryopump |
January 28, 2003 |
| In a power failure recovery, the operating state before a power failure and present conditions of a cryopump are determined to initiate a regeneration or startup process. Where the refrigerator was operating before power failure, it is turned on during recovery to condense gases in the |
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