| Patent Number |
Title Of Patent |
Date Issued |
| 5097418 |
Method and means for managing citations in documents |
March 17, 1992 |
| One of several processes is performed for the automatic management of footnote references in printed documents and a computer-controlled display shows bibliographically correct information in long form and short form in a processing system that provides for information to be enterd, stor |
| 5006760 |
Capacitive feed for plasma reactor |
April 9, 1991 |
| A capacitive feed is disclosed for the lower electrode in a parallel plate plasma reactor. One plate of the capacitor comprises the lower electrode or a contact to the lower electrode. The other plate of the capacitor comprises an annular member insulated from the lower electrode, or the |
| 4790258 |
Magnetically coupled wafer lift pins |
December 13, 1988 |
| An improved pin lift mechanism for plasma processing of semiconductor wafers is disclosed in which the pins are each contained in a non-magnetic tube which is sealed to the wafer chuck. A magnetic slug in each tube couples external motion of a magnet to the pin. |
| 4720628 |
Optical process for determining the endpoint of a process via analog multiplication of photocell |
January 19, 1988 |
| An improved optical endpoint detector is disclosed in which two photocells are used in conjunction with analog multipliers and variable voltage sources, all under microprocessor control. The combination enables one to measure the ratio of intensity of different emission lines, as well as |
