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Inventor: Downey; Stephen W.
Address: Orlando, FL
No. of patents: 3
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7381607 |
Method of forming a spiral inductor in a semiconductor substrate |
June 3, 2008 |
| An inductor formed on a semiconductor substrate, comprising active device regions. The inductor comprises conductive lines formed on a dielectric layer overlying the semiconductor substrate. The conductive lines are patterned and etched into the desired shape, in one embodiment a planar |
| 7075167 |
Spiral inductor formed in a semiconductor substrate |
July 11, 2006 |
| An inductor formed on a semiconductor substrate, comprising active device regions. The inductor comprises conductive lines formed on a dielectric layer overlying the semiconductor substrate. The conductive lines are patterned and etched into the desired shape, in one embodiment a planar |
| 6576563 |
Method of manufacturing a semiconductor device employing a fluorine-based etch substantially fre |
June 10, 2003 |
| The present invention provides a method of manufacturing a semiconductor device. In one embodiment, the method includes forming a positive relief structure from a material located on a substrate, the step of forming the positive relief structure leaving an unwanted remnant of said materi |
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