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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Doezema; Lambert A.
Address:
San Antonio, TX
No. of patents:
2
Patents:












Patent Number Title Of Patent Date Issued
6198300 Silicided silicon microtips for scanning probe microscopy March 6, 2001
A micromechanical sensor probe for a scanned-probe tool includes a silicon cantilever and a silicon tip physically attached to the cantilever. The micromechanical sensor probe has a coating of a refractory metal silicide formed at least on the tip. Titanium silicide is preferred. The pro
6139759 Method of manufacturing silicided silicon microtips for scanning probe microscopy October 31, 2000
A micromechanical sensor probe for a scanned-probe tool comprising a silicon probe and a coating of a refractory metal silicide formed at least on the tip of the probe. Titanium silicide is preferred. A method for manufacturing such a probe includes the steps of, first, providing a s










 
 
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