| Patent Number |
Title Of Patent |
Date Issued |
| 4747577 |
Gate valve with magnetic closure for use with vacuum equipment |
May 31, 1988 |
| A gate valve, for use with evacuable equipment, includes a housing having a pair of aligned ports in opposed walls. A valve seat surrounds one of the ports. A gate member is reciprocally translatable by means of a linear actuator in a direction generally normal to the central axis of the |
| 4676884 |
Wafer processing machine with evacuated wafer transporting and storage system |
June 30, 1987 |
| An evacuable wafer processing machine includes a load-lock station, a wafer transfer station separated from the load-lock station by means of a gate-valve and a wafer coating station. Wafers contained within an evacuated wafer box are loaded into the load-lock station. The load-lock |
| 4523985 |
Wafer processing machine |
June 18, 1985 |
| A sputter coating machine includes a rectilinearly translatable load-lock door closing off one end of an evacuable chamber. Wafers to be coated are loaded and unloaded by an elevator blade onto a chuck carried from the inside surface of the door. A clamping ring clamps the wafer to the c |
| 4522697 |
Wafer processing machine |
June 11, 1985 |
| A sputter coating machine (11) includes a rectilinearly translatable load-lock door (16) closing off one end of a vacuumable chamber (12). Wafers (21) to be coated are loaded and unloaded by an elevated blade (24) onto a chuck (57) carried from the inside surface of the door (16). A |
