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Dietrich; Claus
Sacke, DE
No. of patents:

Patent Number Title Of Patent Date Issued
6864676 Substrate-holding device for testing circuit arrangements on substrates March 8, 2005
A substrate-holding device is designed as a one-piece ceramic element having a number of variably heavily doped layer regions. At least one layer region is a conductive region and at least one layer region is an insulative region. A multilayer chuck structure is thereby formed which

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