| Patent Number |
Title Of Patent |
Date Issued |
| 7552625 |
Force sensing integrated readout and active tip based probe microscope systems |
June 30, 2009 |
| In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible |
| 7518737 |
Displacement-measuring optical device with orifice |
April 14, 2009 |
| Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and |
| 7485847 |
Displacement sensor employing discrete light pulse detection |
February 3, 2009 |
| Optical sensors, and methods for operating optical sensors, are disclosed. One such sensor may include: a reflector positioned a distance from a reflective diffraction grating and a light source for providing light. A first portion of the light can be reflected from the reflective di |
| 7461543 |
Overlay measurement methods with firat based probe microscope |
December 9, 2008 |
| A method, system and unit for determining alignment in a layered device such as a semiconductor device includes providing a first layer having detectable surface and subsurface material properties and positioning a patterned photoresist layer over the first layer, patterned photoresist |
| 7440117 |
Highly-sensitive displacement-measuring optical device |
October 21, 2008 |
| Micron-scale displacement measurement devices having enhanced performance characteristics are disclosed. One embodiment of a micron-scale displacement measurement device includes a phase-sensitive reflective diffraction grating for reflecting a first portion of an incident light and |
| 7395698 |
Three-dimensional nanoscale metrology using FIRAT probe |
July 8, 2008 |
| In accordance with an embodiment of the invention, there is a force sensor for a probe based instrument. The force sensor can comprise a detection surface and a flexible mechanical structure disposed a first distance above the detection surface so as to form a gap between the flexible |
| 7116430 |
Highly-sensitive displacement-measuring optical device |
October 3, 2006 |
| The present invention relates to micron-scale displacement measurement devices. A first embodiment is a device that includes a substrate and a rigid structure suspended above the substrate to form a backside cavity. Formed in the rigid structure is a reflective diffraction grating po |
