Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
DeKraker; David
Address:
Burnsville, MN
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
8142571 Process for treatment of semiconductor wafer using water vapor containing environment March 27, 2012
A process is provided for treating a semiconductor wafer at a target wafer temperature. This process includes the following steps: a) determining the target wafer temperature of the semiconductor wafer during a given wafer treatment process step; b) providing a treatment chamber h
7913706 Rinsing methodologies for barrier plate and venturi containment systems in tools used to process March 29, 2011
Tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like. The invention provides an approach for rapid, efficient rinsing of wetted surface(s), and is particularly a
7819984 Process for treatment of substrates with water vapor or steam October 26, 2010
A method of treating a substrate comprises, in one aspect, placing a substrate having material on a surface thereof in a treatment chamber; directing a stream of a liquid treatment composition to impinge the substrate surface; and directing a stream of water vapor to impinge the subs










 
 
  Recently Added Patents
Nonvolatile semiconductor memory device and method of manufacturing the same
Cellulose derivative and hydrogel thereof
Domestic soda-water preparing device
Hedge shear
Transmitting apparatus and retransmitting method
Method and system for weighted fair queuing
Automatic detection of image degradation in enhanced vision systems
  Randomly Featured Patents
Resin-sealed semiconductor device, circuit member used for the device, and method of manufacturing the circuit member
Charging device, image forming process cartridge, and image forming apparatus including the charging device
Modular radar architecture film (FM/CW or pulse) for automobile collision avoidance applications
Actuator system having a valve manifold
System for controlling damping force characteristic of shock absorber of vehicle
Semiconductor device and method of manufacturing the same
Optimization processing method and apparatus
Knee bolster apparatus with center tether
Ceramic-metal composite substrate
Fingerprint verifying apparatus of small size and method of operating the same