Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
DeKraker; David
Address:
Burnsville, MN
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
8142571 Process for treatment of semiconductor wafer using water vapor containing environment March 27, 2012
A process is provided for treating a semiconductor wafer at a target wafer temperature. This process includes the following steps: a) determining the target wafer temperature of the semiconductor wafer during a given wafer treatment process step; b) providing a treatment chamber h
7913706 Rinsing methodologies for barrier plate and venturi containment systems in tools used to process March 29, 2011
Tool for treating microelectronic workpieces with one or more treatment materials, including liquids, gases, fluidized solids, dispersions, combinations of these, and the like. The invention provides an approach for rapid, efficient rinsing of wetted surface(s), and is particularly a
7819984 Process for treatment of substrates with water vapor or steam October 26, 2010
A method of treating a substrate comprises, in one aspect, placing a substrate having material on a surface thereof in a treatment chamber; directing a stream of a liquid treatment composition to impinge the substrate surface; and directing a stream of water vapor to impinge the subs










 
 
  Recently Added Patents
Resolution setting apparatus, resolution setting method, and recording medium recording a resolution setting program when a television is used as a monitor of a computer
Binder for secondary battery providing excellent adhesion strength and cycle property
Portable computer
Faucet
Semiconductor device, integrated circuit and method of manufacturing an integrated circuit
Cathode material for lithium ion secondary battery and lithium ion secondary battery using it
(4941
  Randomly Featured Patents
Variable thickness double-refracting plate
Battery terminal connection apparatus
Machine for holding workpiece
Cement accelerating agent
Ink-jet printing apparatus and ink cartridge therefor
Surface protective fastener tool
Clamping mechanism for cloth spreading machine catcher
Methods for image characterization and image search
Method and apparatus for weak inversion mode MOS decoupling capacitor
Device for measuring certain properties of particles suspended in a particle suspension