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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
D che; Frank
Address:
Munchen, DE
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7037844 Method for manufacturing a housing for a chip having a micromechanical structure May 2, 2006
A method for manufacturing a chip housing includes a first basis having a photolithograpically structurable layer on a main face, structured into a cover. A chip has the structure at a main face between first contact elements. A second photolithograpically structurable layer applied to t


 
 
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