| |
|
Inventor: Datskos; Panos
Address: Knoxville, TN
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7552636 |
Electron/hole transport-based NEMS gyro and devices using the same |
June 30, 2009 |
| A nanomechanical (NEMS) gyroscope includes an integrated circuit substrate, a pair of spaced apart contact pads disposed on the substrate, and a movable nanoscale element forming at least a portion of a first electrically conductive path electrically coupling the contact pads. The mo |
|
|
|
