Resources Contact Us Home
Das; Sanjit
Austin, TX
No. of patents:

Patent Number Title Of Patent Date Issued
6001730 Chemical mechanical polishing (CMP) slurry for polishing copper interconnects which use tantalum December 14, 1999
A method for forming a copper interconnect on an integrated circuit (IC) begins by forming a dielectric layer (20) having an opening. A tantalum-based barrier layer (21), such as TaN or TaSiN, is formed within the opening in the layer (20). A copper layer (22) is formed over the barr
5897375 Chemical mechanical polishing (CMP) slurry for copper and method of use in integrated circuit ma April 27, 1999
A method for chemical mechanical polishing (CMP) a copper layer (22) begins by forming the copper layer (22). The copper layer (22) is then exposed to a slurry (24). The slurry (24) contains an oxidizing agent such as H.sub.2 O.sub.2, a carboxylate salt such as ammonium citrate, an abras
5882243 Method for polishing a semiconductor wafer using dynamic control March 16, 1999
A polishing system (10) is used to polish a semiconductor wafer (16) in accordance with the present invention. Polishing system (10) includes a wafer carrier (14) which includes a modulation unit (20). Modulation unit (20) includes a plurality of capacitors made up of a flexible lower pl

  Recently Added Patents
Method and system for efficient DRX operation during handover in LTE
Apparatus and method for exerting force on a subject tissue
Supply voltage generating circuit and semiconductor device having the same
Auto-aligning spectroscopy system
Bioreactor device, and method and system for fabricating tissues in the bioreactor device
Method and system for reciprocal mixing cancellation of wideband modulated blockers
Control system for an internal combustion engine
  Randomly Featured Patents
Extractable variably controlled diameter stent and method of using the same
Coated receiver sheets
Electrically heated/phase change probe temperature control
Hopping mechanism for model car
Navigation method, device, system and computer readable medium
Covered sandbox
Battery powered occupancy sensor
Kennel, circular facility
Fluid level sensor employing hot wire probe and digital sample and hold circuitry
Sintered ferromagnetic powder metal parts for alternating current applications