Resources Contact Us Home
Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Das; Sanjit
Address:
Austin, TX
No. of patents:
3
Patents:












Patent Number Title Of Patent Date Issued
6001730 Chemical mechanical polishing (CMP) slurry for polishing copper interconnects which use tantalum December 14, 1999
A method for forming a copper interconnect on an integrated circuit (IC) begins by forming a dielectric layer (20) having an opening. A tantalum-based barrier layer (21), such as TaN or TaSiN, is formed within the opening in the layer (20). A copper layer (22) is formed over the barr
5897375 Chemical mechanical polishing (CMP) slurry for copper and method of use in integrated circuit ma April 27, 1999
A method for chemical mechanical polishing (CMP) a copper layer (22) begins by forming the copper layer (22). The copper layer (22) is then exposed to a slurry (24). The slurry (24) contains an oxidizing agent such as H.sub.2 O.sub.2, a carboxylate salt such as ammonium citrate, an abras
5882243 Method for polishing a semiconductor wafer using dynamic control March 16, 1999
A polishing system (10) is used to polish a semiconductor wafer (16) in accordance with the present invention. Polishing system (10) includes a wafer carrier (14) which includes a modulation unit (20). Modulation unit (20) includes a plurality of capacitors made up of a flexible lower pl










 
 
  Recently Added Patents
Sealed, waterproof digital electronic camera system and method of fabricating same
Systems and methods for switching supply load current estimation
Highly stable electrolytic water with reduced NMR half line width
Cationic polymers for antimicrobial applications and delivery of bioactive materials
Communication device
System and methods for facilitating and documenting user thinking and learning using enhanced interactive constructs
Method, apparatus or computer program for changing from scheduled to unscheduled communication modes
  Randomly Featured Patents
Apparatus for assisting the transfer of a web to a drying section
Intermetallic compound-based, composite superconductor
Mounting device for the movable part of a cooling or heating grate
Method for inducing anorexia using nalmetrene
Retraction tube for use with bone screw
System and method for scaling an image
Apertured panel corner mount fastener for concrete walls
Tensile strain source using silicon/germanium in globally strained silicon
Door opening and closing device using a robot
Method and arrangement for measuring and evaluating temperatures in temperature processed goods