Resources Contact Us Home
Das; Sanjit
Austin, TX
No. of patents:

Patent Number Title Of Patent Date Issued
6001730 Chemical mechanical polishing (CMP) slurry for polishing copper interconnects which use tantalum December 14, 1999
A method for forming a copper interconnect on an integrated circuit (IC) begins by forming a dielectric layer (20) having an opening. A tantalum-based barrier layer (21), such as TaN or TaSiN, is formed within the opening in the layer (20). A copper layer (22) is formed over the barr
5897375 Chemical mechanical polishing (CMP) slurry for copper and method of use in integrated circuit ma April 27, 1999
A method for chemical mechanical polishing (CMP) a copper layer (22) begins by forming the copper layer (22). The copper layer (22) is then exposed to a slurry (24). The slurry (24) contains an oxidizing agent such as H.sub.2 O.sub.2, a carboxylate salt such as ammonium citrate, an abras
5882243 Method for polishing a semiconductor wafer using dynamic control March 16, 1999
A polishing system (10) is used to polish a semiconductor wafer (16) in accordance with the present invention. Polishing system (10) includes a wafer carrier (14) which includes a modulation unit (20). Modulation unit (20) includes a plurality of capacitors made up of a flexible lower pl

  Recently Added Patents
Undercabinet plug-in mount
Image processing device, image forming apparatus, and non-transitory computer readable recording medium
Systems and methods for sorting particles
Model matching for trace link generation
Performance apparatus and electronic musical instrument
Caching techniques
Printing apparatus
  Randomly Featured Patents
Apparatus for culturing animal cells
Ferroelectric component and manufacturing the same
Re-sealable container lid
Method of manufacturing an array of electrical conductors
Optical information recording/reproducing apparatus
Optical sensor and optical process for the characterization of a chemical and/or bio-chemical substance
Semiconductor storage unit
Stranded composite cable and method of making and using
Method and apparatus for remote control and monitoring of a multimedia system
Headlight optical axis adjustment device