Resources Contact Us Home
Das; Sanjit
Austin, TX
No. of patents:

Patent Number Title Of Patent Date Issued
6001730 Chemical mechanical polishing (CMP) slurry for polishing copper interconnects which use tantalum December 14, 1999
A method for forming a copper interconnect on an integrated circuit (IC) begins by forming a dielectric layer (20) having an opening. A tantalum-based barrier layer (21), such as TaN or TaSiN, is formed within the opening in the layer (20). A copper layer (22) is formed over the barr
5897375 Chemical mechanical polishing (CMP) slurry for copper and method of use in integrated circuit ma April 27, 1999
A method for chemical mechanical polishing (CMP) a copper layer (22) begins by forming the copper layer (22). The copper layer (22) is then exposed to a slurry (24). The slurry (24) contains an oxidizing agent such as H.sub.2 O.sub.2, a carboxylate salt such as ammonium citrate, an abras
5882243 Method for polishing a semiconductor wafer using dynamic control March 16, 1999
A polishing system (10) is used to polish a semiconductor wafer (16) in accordance with the present invention. Polishing system (10) includes a wafer carrier (14) which includes a modulation unit (20). Modulation unit (20) includes a plurality of capacitors made up of a flexible lower pl

  Recently Added Patents
Zoom lens, imaging device and information device
Noise reduction device and noise reduction method
Electronic apparatus and electronic system
Transmit phase control for the echo cancel based full duplex transmission system
Hand-held device and method for operating a single pointer touch sensitive user interface
Business process nesting method and apparatus
Cooking grill
  Randomly Featured Patents
Carpenter bee trap
Therapeutic ultrasound system
Method of and apparatus for driving aircraft generator at a constant-speed
Hermetically sealed optical fibre with voids or holes, method of its production, and its use
Radionuclide metal chelates for the radiolabeling of proteins
Communication system for a closed-user group
Drawer stabilizer and self-closer mechanism
Media qualification accessory and method
Adapter for a manually operated dispensing device of containers of liquid