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Inventor: D'Acosta; Carl E.
Address: Mesa, AZ
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5851928 |
Method of etching a semiconductor substrate |
December 22, 1998 |
| A method of etching a semiconductor substrate (11) includes thinning (102) the semiconductor substrate (11), providing (103) a support layer (30) for the semiconductor substrate (11), providing (104) an etch mask (28) over the semiconductor substrate (11), and etching (105) the semicondu |
| 5306920 |
Ion implanter with beam resolving apparatus and method for implanting ions |
April 26, 1994 |
| An ion implantation apparatus including a resolving aperture-shutter assembly (31) placed in the ion beam path (18). The resolving aperture-shutter assembly includes a movable shutter (34) and a shutter housing surrounding the movable shutter (34). Selected ions in an ion beam path ( |
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