| |
|
Inventor: Crosland; Nigel
Address: Cambridgeshire, GB
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 6885009 |
Device for influencing an electron beam |
April 26, 2005 |
| A device for influencing an electron beam, especially a deflector unit for an electron beam lithography machine, comprises a plurality of coil formers (12b) each with a bore (16) defining a passage for the beam and each carrying coils (18, 19) operable to generate magnetic fields for |
|
|
|