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Inventor:
Crosland; Nigel
Address:
Cambridgeshire, GB
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
6885009 Device for influencing an electron beam April 26, 2005
A device for influencing an electron beam, especially a deflector unit for an electron beam lithography machine, comprises a plurality of coil formers (12b) each with a bore (16) defining a passage for the beam and each carrying coils (18, 19) operable to generate magnetic fields for










 
 
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