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Inventor: Clark, Jr.; Lloyd D.
Address: Portsmouth, VA
No. of patents: 1
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 5116464 |
Cesium hydroxide etch of a semiconductor crystal |
May 26, 1992 |
| An aqueous solution of cesium hydroxide serves as a highly selective anisotropic etch for semiconductor crystals including silicon. The cesium hydroxide also has a high etch selectivity for tantalum with respect to semiconductor crystals. |
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