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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Choi; Hyo-Seok
Address:
Seoul, KR
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
5740065 Method for manufacturing semiconductor device April 14, 1998
A method for manufacturing a semiconductor device comprises the steps of extracting an optimal working condition by accumulatively averaging accumulated working conditions of lots previously performed in an expectation process to be currently performed in the manufacturing equipment,


 
 
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