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Inventor: Chang; Josphine J.
Address: Carmichael, CA
No. of patents: 2
Patents:
| Patent Number |
Title Of Patent |
Date Issued |
| 7790583 |
Clean process for an electron beam source |
September 7, 2010 |
| One embodiment of the present invention is a method for cleaning an electron beam treatment apparatus that includes: (a) generating an electron beam that energizes a cleaning gas in a chamber of the electron beam treatment apparatus; (b) monitoring an electron beam current; (c) adjus |
| 7323399 |
Clean process for an electron beam source |
January 29, 2008 |
| One embodiment of the present invention is a method for cleaning an electron beam treatment apparatus that includes: (a) generating an electron beam that energizes a cleaning gas in a chamber of the electron beam treatment apparatus; (b) monitoring an electron beam current; (c) adjus |
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