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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Chang; Josphine J.
Address:
Carmichael, CA
No. of patents:
2
Patents:












Patent Number Title Of Patent Date Issued
7790583 Clean process for an electron beam source September 7, 2010
One embodiment of the present invention is a method for cleaning an electron beam treatment apparatus that includes: (a) generating an electron beam that energizes a cleaning gas in a chamber of the electron beam treatment apparatus; (b) monitoring an electron beam current; (c) adjus
7323399 Clean process for an electron beam source January 29, 2008
One embodiment of the present invention is a method for cleaning an electron beam treatment apparatus that includes: (a) generating an electron beam that energizes a cleaning gas in a chamber of the electron beam treatment apparatus; (b) monitoring an electron beam current; (c) adjus










 
 
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