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Inventor:
Buck; Jesse D.
Address:
San Marcos, CA
No. of patents:
11
Patents:












Patent Number Title Of Patent Date Issued
7079556 Bandwidth control technique for a laser July 18, 2006
A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodi
6735236 High power gas discharge laser with line narrowing unit May 11, 2004
A grating based line narrowing device for line narrowing lasers producing high energy laser beams. Techniques are provided for minimizing adverse effects of hot gas layers present on the face of the grating.In preferred embodiments a stream of gas is directed across the face of the grati
6721340 Bandwidth control technique for a laser April 13, 2004
A technique for bandwidth control of an electric discharge laser. Line narrowing equipment is provided having at least one piezoelectric drive and a fast bandwidth detection means and a bandwidth control having a time response of less than about 1.0 millisecond. In a preferred embodiment
6493374 Smart laser with fast deformable grating December 10, 2002
A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an R.sub.MAX mirror and bandwidth is controller by adj
6396582 Wavelength reference for laser May 28, 2002
The present invention includes a system and method for characterizing the wavelength of a beam of radiation using a known reference transition. The invention comprises a vapor including a material having a transition which absorbs radiation of a known wavelength, the vapor being containe
6396062 Portable laser beam monitor May 28, 2002
A portable laser beam monitor utilizes a plurality of optical trains to monitor ultraviolet laser beam profiles at a plurality of positions along a laser beam path. A preferred embodiment useful for monitoring beam profiles of lithography lasers measures the beam profile at the front
6359693 Double pass double etalon spectrometer March 19, 2002
A first double pass etalon based spectrometer. In a preferred embodiment a second etalon matched to the first double pass etalon is used to produce extremely precise fringe data. Spectral components of a diffused beam are angularly separated as they are transmitted through an etalon. A
6317448 Bandwidth estimating technique for narrow band laser November 13, 2001
A wavelength system for measuring the bandwidth of a narrowband laser utilizing prior art equipment normally provided for calibrating wavelength measurement equipment. The prior art includes a wavemeter for measuring incremental changes in wavelength and an atomic wavelength reference fo
6212217 Smart laser with automated beam quality control April 3, 2001
A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage, wavelength by controlling the position of an R.sub.MAX mirror in a line narrowing module and ban
6192064 Narrow band laser with fine wavelength control February 20, 2001
A smart laser having automatic computer control of pulse energy, wavelength and bandwidth using feedback signals from a wavemeter. Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an R.sub.MAX mirror in a line nar
6114704 Front-illuminated fluorescent screen for UV imaging September 5, 2000
In one embodiment of the invention, phosphor powder in a binder is deposited on a flat first side of a fused silica substrate. The UV output of a laser beam is reflected off an angled beam splitter so as to be incident upon a flat second side of the fused silica substrate. The phosph










 
 
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