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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Birkelund; Karen
Address:
Koebenhavn Oe, DK
No. of patents:
1
Patents:




Patent Number Title Of Patent Date Issued
7246525 Silicon pressure sensor with decreased pressure equalization between measured pressure and refer July 24, 2007
This invention relates to absolute pressure sensors with two bonded wafers containing a pressure sensing structure and forming a reference pressure chamber and a buffer chamber. Since the buffer chamber collects molecules, which permeate through a bonding interface between the two wa


 
 
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