| Patent Number |
Title Of Patent |
Date Issued |
| 7221433 |
Stage assembly including a reaction assembly having a connector assembly |
May 22, 2007 |
| A stage assembly (220) for moving and positioning a device (200) includes a stage base (202), a stage (206), a stage mover assembly (204), and a reaction assembly (226). The stage mover assembly (204) moves the stage (206) relative to the stage base (202). The reaction assembly (226) is |
| 6958808 |
System and method for resetting a reaction mass assembly of a stage assembly |
October 25, 2005 |
| A stage assembly for moving and positioning a device is provided herein. The stage assembly includes a stage base, a stage, a stage mover assembly, a reaction mass assembly, a reaction mover assembly, and a control system. The stage mover assembly moves the stage relative to the stage ba |
| 6888620 |
System and method for holding a device with minimal deformation |
May 3, 2005 |
| A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) |
| 6885430 |
System and method for resetting a reaction mass assembly of a stage assembly |
April 26, 2005 |
| A stage assembly includes a stage base, a stage, a stage mover assembly, a reaction mass assembly, a reaction mover assembly, and a control system. The stage mover assembly moves the stage relative to the stage base. The reaction mass assembly reduces the reaction forces created by the s |
| 6882126 |
Holder mover for a stage assembly |
April 19, 2005 |
| A stage assembly (10) for moving and positioning a device (26) includes a device table (20), a device holder (24) that retains the device (26), and a stage mover assembly (14). The stage assembly (10) includes one or more features that can isolate the device holder 24 and the device (26) |
| 6842248 |
System and method for calibrating mirrors of a stage assembly |
January 11, 2005 |
| A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a device table (48), a stage mover assembly (16), a measurement system (20), and a control system (22). The stage mover assembly (16) moves the device ta |
| 6757053 |
Stage assembly including a reaction mass assembly |
June 29, 2004 |
| A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction mass assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and alon |
| 6731372 |
Multiple chamber fluid mount |
May 4, 2004 |
| A fluid mount (10) for an exposure apparatus (32) includes a first subsystem (12) and a second subsystem (14). The first subsystem (12) includes a first cylinder (18) and a first piston (20). The first piston (20) moves within the first cylinder (18) along a first axis (26). The seco |
| 6603531 |
Stage assembly including a reaction assembly that is connected by actuators |
August 5, 2003 |
| A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y |
| 6593997 |
Stage assembly including a reaction assembly |
July 15, 2003 |
| A stage assembly (10) for moving and positioning a device (26) is provided herein. The stage assembly (10) includes a stage base (12), a stage (14), a stage mover assembly (16), and a reaction assembly (18). The stage mover assembly (16) moves the stage (14) along an X axis and along a Y |
| 6408767 |
Low stiffness suspension for a stage |
June 25, 2002 |
| A suspension system (18) for suspending a stage (14) spaced apart from a stage base (12) is provided herein. The suspension system (18) includes a plurality of spaced apart suspension assemblies (20). Each suspension assembly (20) includes a fluid pad (22) and an adaptable section (24). |
| 6313550 |
Coil mounting and cooling system for an electric motor |
November 6, 2001 |
| A coil assembly (14) used with a magnet assembly (12) for a linear or planar electric motor (10) is provided herein. The coil assembly (14) includes a plurality of coils (18) attached to a coil base (16) with a plurality of coil supports (22). The coil supports (22) secure the coils |
| 6304320 |
Stage device and a method of manufacturing same, a position controlling method, an exposure devi |
October 16, 2001 |
| In a stage device, prior to two-dimensional movement of a stage, a first driving device disposed on a side of the stage where an object is loaded drives the stage in a first-axis direction, and a second driving device disposed on a side of the stage opposite to the side where the object |
