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Browse by: INVENTOR PATENT HOLDER PATENT NUMBER DATE
 
 
Inventor:
Baron; Jonathan
Address:
Haifa, IL
No. of patents:
1
Patents:












Patent Number Title Of Patent Date Issued
6566169 Method and apparatus for local vectorial particle cleaning May 20, 2003
Particles are removed from the surface of a substrate. Respective position coordinates of the particles on the surface are determined. A beam of electromagnetic energy is directed at the coordinates of each of the particles in turn, such that absorption of the electromagnetic energy at










 
 
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