| Patent Number |
Title Of Patent |
Date Issued |
| 5392361 |
Method and apparatus for detecting position of a mark |
February 21, 1995 |
| A mark position detecting method and apparatus, suitably usable in a semiconductor device manufacturing exposure apparatus, called a stepper, prints images of a pattern of a reticle upon different shot areas on a semiconductor wafer, and aligns the reticle and the wafer. In this method, |
| 5365342 |
Alignment and exposure apparatus and method for manufacture of integrated circuits |
November 15, 1994 |
| An alignment apparatus includes a first off-axis alignment optical system having a magnification, and a second off-axis alignment optical system having a magnification higher than that of the first off-axis alignment optical system, wherein the apparatus is operable in a global alignment |
| 5197118 |
Control system for a fine pattern printing apparatus |
March 23, 1993 |
| A system for controlling operation of a fine pattern printing apparatus. The system including a command storing portion in which a plurality of unit-operation instructing commands capable of instructing execution of corresponding unit operations which are components of the pattern printi |
| 4962423 |
Mark detecting method and apparatus |
October 9, 1990 |
| Mark detecting method and apparatus usable, for example, in a semiconductor exposure apparatus such as a stepper for printing a pattern of a reticle upon a semiconductor wafer, for detecting, by using an image sensor, an alignment mark provided on a reticle or wafer for alignment of the |
| 4937618 |
Alignment and exposure apparatus and method for manufacture of integrated circuits |
June 26, 1990 |
| An alignment apparatus including a first off-axis alignment optical system having a magnification, and a second off-axis alignment optical system having a magnification higher than that of the first off-axis alignment optical system, wherein the apparatus is operable in a global alignmen |
| 4933715 |
Method of detecting position of a mark |
June 12, 1990 |
| A mark detecting method and device suitably applicable to the alignment of a reticle in a semiconductor device manufacturing exposure apparatus, called a stepper, is disclosed. A mark is provided by repeated patterns having specific pitches. These patterns are set so that at least one pi |
| 4918320 |
Alignment method usable in a step-and-repeat type exposure apparatus for either global or dye-by |
April 17, 1990 |
| A method of aligning a semiconductor wafer, usable in a step-and-repeat type exposure apparatus for projecting, in a reduced scale, images of a pattern formed on a reticle upon different shot areas on the semiconductor wafer in a predetermined sequence. According to this alignment method |
| 4866532 |
Printing apparatus for system |
September 12, 1989 |
| A printing apparatus or system has CCDs for reading out image data from an original or originals, a memory for storing the image data, a plurality of recording sections with recording heads, a control for controlling the overall circuitry and mechanical parts. A desired number of copies |
| 4794648 |
Mask aligner with a wafer position detecting device |
December 27, 1988 |
| A mask aligner includes a TV image pick-up device having a wide field angle and picking up the image of a wafer detection pattern on an image pick-up station to generate TV signals at the output, a fine alignment device for detecting a positional deviation of the wafer relative to a mask |
| 4719357 |
Semiconductor circuit manufacturing apparatus having selectively operable detectors for effectin |
January 12, 1988 |
| A semiconductor circuit manufacturing apparatus wherein a wafer has a plurality of zones to be exposed one by one to a pattern of a mask, including detector apparatus for detecting a relative position between the mask and a said zone to be exposed and producing outputs representative of |
| 4718040 |
Printing apparatus or system for recording a color image |
January 5, 1988 |
| A printing apparatus or system has CCDs for reading out image data from an original or originals, a memory for storing the image data, a plurality of recording sections with recording heads, a control for controlling the overall circuitry and mechanical parts. A desired number of copies |
| 4713784 |
Alignment apparatus |
December 15, 1987 |
| An alignment apparatus includes an illumination source for illuminating an object having a mark, a photoreceptor for receiving light reflected by the object, a converter for digitizing the output signal level of the photoreceptor, a circuit for determining a slice level on the basis of t |
| 4707713 |
Image recording apparatus |
November 17, 1987 |
| An image recording apparatus having a mechanism for registering at least one recording mode, for example a frequently-used basic mode or a color mode, and having a mechanism for setting another mode to be used for recording in a particular instance. In another aspect, the apparatus has a |
| 4694502 |
Color image reading apparatus |
September 15, 1987 |
| A multi-color image reading device is described in which plural photoelectric converting means convert the light beam from an original color image into electrical color separation signals, a color identification means produces plural color signals corresponding to colors of the multi |
| 4688088 |
Position detecting device and method |
August 18, 1987 |
| An improved method and device for detecting a position of a mark formed on an object, by providing plural peaks in an image density distribution, wherein the image of the object having the mark is picked up to provide an image signal which in turn is processed to provide an integrated |
| 4669867 |
Alignment and exposure apparatus |
June 2, 1987 |
| An alignment and exposure apparatus in which sequential operations of pattern projection for projecting a pattern of a first object, at a reduced ratio, onto a second object through an optical system, stepwise movement for moving the second object stepwise relative to the first objec |
| 4663534 |
Position detecting device utilizing selective outputs of the photodetector for accurate alignmen |
May 5, 1987 |
| A position detecting device including a photodetector having a plurality of light-receiving sections. For the position detection, an appropriate one or ones of the light-receiving sections are selectable, whereby an alignment accuracy and an alignment speed relative to two objects having |
| 4655599 |
Mask aligner having a photo-mask setting device |
April 7, 1987 |
| A mask aligner includes a photo-mask having a plurality of first marks used to align the photo-mask with a wafer and a plurality of second marks used to align the photo-mask with the mask aligner, the number of the second marks being equal to that of the first marks; a wafer having a plu |
| 4641257 |
Measurement method and apparatus for alignment |
February 3, 1987 |
| A measurement apparatus, includes a detector for detecting marks of plural objects to produce a series of signals; a peak detector for detecting peak values of the signals; a device for determining a slice level for each of the peak values detected by the peak detector; and a comparator |
| 4641071 |
System for controlling drive of a wafer stage |
February 3, 1987 |
| A system for controlling drive of a movable member for carrying a workpiece such as a semiconductor wafer, the system including a first servo control system effective to move the workpiece carrying member at a relatively high speed and with a relatively low positional accuracy for stoppa |
| 4634876 |
Object position detecting apparatus using accumulation type sensor |
January 6, 1987 |
| A device for detecting a position of an object including apparatus for producing a light beam, apparatus for scanningly deflecting the light beam with respect to the object, apparatus for sensing an image of the object resulting from the scan and accumulating information therefrom as an |
| 4553834 |
Mask aligner having a malfunction disposal device |
November 19, 1985 |
| A mask aligner for aligning a wafer with a mask and exposing the wafer to an image of the mask, includes an illumination source for illuminating the mask, plural devices for executing plural functions of the aligner, a controller for controlling operation of the apparatus in accordance w |
| 4538182 |
Image processing apparatus |
August 27, 1985 |
| An image processing apparatus has CCDs for reading image data of an original, an edge detector for detecting edges of an area specified on the original with a loop or marks of a specific color, an area detector for detecting the specified area, memories for storing the image data read by |
| 4527885 |
Image recording system having multiple image recording means |
July 9, 1985 |
| An image recording system comprises a plurality of image recording units that can selectively be driven to achieve most efficient operation. For example, the system may also include an input unit for entering image information and a control unit for selectively supplying image informatio |
| 4521805 |
Printing apparatus or system |
June 4, 1985 |
| A printing apparatus has at least one first recording head and at least one second recording head. These recording heads allow recording in binary mode, halftone mode, normal mode, and fine mode. A printing system has at least two recording units. One recording unit has a plurality of re |
| 4500918 |
Original reading apparatus |
February 19, 1985 |
| Disclosed is an original reading apparatus in which the image of an original illuminated by a lamp is formed on each of a plurality of image pick-up elements through an imaging lens and image information of different colors is converted into electrical signals by the image pick-up el |
| 4476486 |
Image recording system utilizing a plurality of recording units |
October 9, 1984 |
| An image recording apparatus of the invention has a number of recording units for recording image data of the same or different colors on one or more recording media; a counter to set the number of copies to be produced; and a switch device which selects the recording units to be used |
| 4463361 |
Ink jet recording apparatus with vacuum platen |
July 31, 1984 |
| A recording apparatus includes a stationary suction member having a number of openings disposed opposite to recording device. Through the openings a suction force is applied to a recording paper to keep the paper in close contact with the stationary suction member for flat registration. |
| 4461956 |
Solid-state photoelectric converter |
July 24, 1984 |
| A photoelectric converter in solid-state assembly, comprising the following sections formed on the same substrate: a photoelectric converting section constituted of a number of photoelectric converting elements arranged in an array, each element having a light-receiving surface for input |
| 4405857 |
Solid-state photoelectric converter |
September 20, 1983 |
| A photoelectric converter in solid-state assembly, comprising the following sections juxtaposed integrally on the same substrate: a photoelectric converting section constituted of a number of photoelectric converting elements arranged in an array, each element having a light-receiving |
| 4390791 |
Solid-state photoelectric transducer |
June 28, 1983 |
| A solid-state photoelectric transducer comprises a plurality of output units for photoelectrically converted signals which units are constructed of: a plurality of photoelectric converter elements, a plurality of signal accumulators for accumulating signals output from said photoelectric |
