| Patent Number |
Title Of Patent |
Date Issued |
| 7576303 |
Wafer holder, and wafer prober provided therewith |
August 18, 2009 |
| A wafer holder is provided having high rigidity and an enhanced heat-insulating effect that allow positional accuracy and heating uniformity to be improved, a chip to be rapidly heated and cooled, and the manufacturing cost to be reduced, and a wafer prober apparatus on which the waf |
| 7554059 |
Heater unit and semiconductor manufacturing apparatus including the same |
June 30, 2009 |
| A ceramic heater attaining more uniform temperature distribution from the start to the end of cooling is provided. Further, in a cooling module used for cooling the heater, liquid leakage during use is prevented, degradation in cooling capability is prevented and the performance is m |
| 6458298 |
Process for molding ceramics |
October 1, 2002 |
| A wet molding method in which a ceramic slurry is charged into a cavity and uniaxially pressed by a punch to remove excess liquid from a portion of the slurry facing the punch to effect molding, the method being improved by maintaining at least one of the following conditions; (a) the |
| 6123460 |
Hydrodynamic gas bearing structure and optical deflection scanner comprising the same |
September 26, 2000 |
| A hydrodynamic gas bearing structure can prevent the occurrence of whirl not only in high-speed rotation but also in low-speed rotation, and is capable of suppressing dispersion of a floating rotational frequency. The hydrodynamic gas bearing structure includes a shaft body (1) and a bea |
| 6082900 |
Dynamic pressure pneumatic bearing structure and method of manufacturing the same |
July 4, 2000 |
| Provided is a hydrodynamic gas bearing structure which can prevent occurrence of whirl not only in high-speed rotation but also in low-speed rotation, reduces such frequency that a floating rotational frequency in starting or stoppage of rotation increases, and is capable of shifting the |
| 5538927 |
Silicon nitride powder and its manufacturing |
July 23, 1996 |
| A silicon nitride powder with which a highly reliable silicon nitride with high strength and small strength and dimensional variances is obtainable is disclosed. By setting the amount of their surface acidic groups per B.E.T. surface area to not less than 0.2 .mu.eq/m.sup.2, their di |
| 5538927 |
Silicon nitride powder and its manufacturing |
July 23, 1996 |
| A silicon nitride powder with which a highly reliable silicon nitride with high strength and small strength and dimensional variances is obtainable is disclosed. By setting the amount of their surface acidic groups per B.E.T. surface area to not less than 0.2 .mu.eq/m.sup.2, their di |
| 5394015 |
Method of producing sintered silicon nitrides |
February 28, 1995 |
| The invention provides a method of producing sintered silicon nitrides having such strength characteristics as are sufficient to insure satisfactory reliability of the sintered silicon nitride for use in applications such as automotive engine parts and bearings. The method comprises |
| 5385701 |
Method of molding silicon nitride ceramics |
January 31, 1995 |
| Disclosed herein are a method for molding a high density and homogeneous silicon nitride ceramics within a short time and an apparatus used for the method. A gel-like slurry mixture which is a mixture of ceramic powders consisting mainly of Si.sub.3 N.sub.4 and a liquid and has a powder |
| 5275986 |
Silicon nitride sintered body |
January 4, 1994 |
| A silicon nitride sintered body comprising .alpha.-silicon nitride including .alpha.'-sialon and .beta.'-sialon including .beta.-silicon nitride in which the content of the .alpha.-silicon nitride including .alpha.'-sialon in the surface part thereof is less than its content in the i |
